Calculation strength of torsion bar suspension of micromirrors (MEOMS)
The paper considers the strength calculation of the torsion bar suspension of a micromirror with a reflective layer of high optical quality of the surface for deflecting the reflected laser beam. By changing the angle of inclination of the micromirror, the laser beam enters the various input ch...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Omsk State Technical University, Federal State Autonoumos Educational Institution of Higher Education
2021-06-01
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| Series: | Омский научный вестник |
| Subjects: | |
| Online Access: | https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2021/%E2%84%96%203%20(177)%20(%D0%9E%D0%9D%D0%92)/5-12%20%D0%A7%D0%B5%D1%80%D0%BD%D1%8F%D0%B2%D1%81%D0%BA%D0%B8%D0%B9%20%D0%94.%20%D0%98.,%20%D0%A7%D0%B5%D1%80%D0%BD%D1%8F%D0%B2%D1%81%D0%BA%D0%B8%D0%B9%20%D0%94.%20%D0%94..pdf |
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| Summary: | The paper considers the strength calculation of the torsion
bar suspension of a micromirror with a reflective layer
of high optical quality of the surface for deflecting the
reflected laser beam. By changing the angle of inclination
of the micromirror, the laser beam enters the various input
channels of the optical sensor. In this case, a control signal
is generated for the further operation of the microcircuit.
Thus, the micromirror performs the function of a switch for
input optical channels connecting certain input or output
elements of the microcircuit in various combinations for
further processing.
In this work, the calculation of the strength parameters of
the mechanical structure of a micromirror made of various
materials has been carried out. Practical recommendations
related to the development of micromirror torsion bar
suspension are given. |
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| ISSN: | 1813-8225 2541-7541 |