Discharge system with electron oscillations in the emission region for the positive ion source
Design of the discharge system with electron oscillations in the emission region for the positive ion source was studied. Realization of the conditions for electron oscillation in the emission region of the electrode system allowed to increase the energy efficiency of a glow discharge. Obtained char...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2009-01-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2009/2/articles/en/jnep_eng_2009_V1_N2_48-51.pdf |
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| Summary: | Design of the discharge system with electron oscillations in the emission region for the positive ion source was studied. Realization of the conditions for electron oscillation in the emission region of the electrode system allowed to increase the energy efficiency of a glow discharge. Obtained characteristics of the discharge with electron oscillation in the emission region of the discharge chamber allow to conclude about possibility of its application in the positive ion source operating at low pressure in the discharge chamber. |
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| ISSN: | 2077-6772 |