Improving product size measurement systems by using piezo-fiber scanner

The article discusses the physical and technical basis for the construction and operation of systems for measuring the size of complex products, taking into account the use of a new spatial light modulator — a piezo-fiber scanner. Its device, operating principle, and main technical characteristi...

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Bibliographic Details
Main Author: E. V. Leun
Format: Article
Language:English
Published: Omsk State Technical University, Federal State Autonoumos Educational Institution of Higher Education 2020-03-01
Series:Омский научный вестник
Subjects:
Online Access:https://www.omgtu.ru/general_information/media_omgtu/journal_of_omsk_research_journal/files/arhiv/2020/1%20(169)/73-79%20%D0%9B%D0%B5%D1%83%D0%BD%20%D0%95.%20%D0%92..pdf
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Summary:The article discusses the physical and technical basis for the construction and operation of systems for measuring the size of complex products, taking into account the use of a new spatial light modulator — a piezo-fiber scanner. Its device, operating principle, and main technical characteristics are described. The paper considers the joint operation of a piezo-fiber scanner and a low-coherence interferometer as part of three measurement systems: scanning hybrid 3D measuring heads (MH) with the introduction of an ultra-wide-angle optical system and a corundum tip, as well as two active control devices. It is proposed to use a reference channel for the discussed MH design, and to measure the clearances 1с1 , 1с2 … 1сn when contacting the product arising between the corundum tip and the product near the formed contact zone with the subsequent calculation of the so-called equidistant contours and the final compensation of elastic deformations.
ISSN:1813-8225
2541-7541