Towards Next-Generation Glucose Sensors: Reactively Sputtered Nanostructured Nickel Nitrides for CMOS Integration
A facile and clean-room compatible approach to Ni nitride (Ni<sub>x</sub>N<sub>y</sub>) synthesis is proposed, based on a reactive sputtering deposition technique. Ni<sub>x</sub>N<sub>y</sub> thin films were deposited at different N<sub>2</sub...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-04-01
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| Series: | Proceedings |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2504-3900/97/1/156 |
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