Dynamic Study of a Capacitive MEMS Switch with Double Clamped-Clamped Microbeams
We study a capacitive MEMS switch composed of two clamped-clamped exible microbeams. We first develop a mathematical model for the MEMS switch where the upper microbeam represents the ground transmission line and the lower one represents the central transmission line. An electrostatic force is appli...
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| Format: | Article |
| Language: | English |
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Wiley
2014-01-01
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| Series: | Shock and Vibration |
| Online Access: | http://dx.doi.org/10.1155/2014/807489 |
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| author | Hatem Samaali Fehmi Najar Slim Choura |
| author_facet | Hatem Samaali Fehmi Najar Slim Choura |
| author_sort | Hatem Samaali |
| collection | DOAJ |
| description | We study a capacitive MEMS switch composed of two clamped-clamped exible microbeams. We first develop a mathematical model for the MEMS switch where the upper microbeam represents the ground transmission line and the lower one represents the central transmission line. An electrostatic force is applied between the two microbeams to yield the switch to its ON and OFF states. We derive the equations of motion of the system and associated boundary conditions and solve the static and dynamic problems using the differential quadratic method. We show that using only nine grid points gives relatively accurate results when compared to those obtained using FEM. We also examine the transient behavior of the microswitch and obtain results indicating that subsequent reduction in actuation voltage, switching time, and power consumption are expected along with relatively good RF performances. ANSYS HFSS simulator is used in this paper to extract the RF characteristics of the microswitch. HFSS simulation results show that the insertion loss is as low as −0.31 dB and that the return loss is better than −12.41 dB at 10 GHz in the ON state. At the OFF state, the isolation is lower than −23 dB in the range of 10 to 50 GHz. |
| format | Article |
| id | doaj-art-d8d132d3a9bc491692205a0839efca65 |
| institution | Kabale University |
| issn | 1070-9622 1875-9203 |
| language | English |
| publishDate | 2014-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | Shock and Vibration |
| spelling | doaj-art-d8d132d3a9bc491692205a0839efca652025-02-03T05:58:32ZengWileyShock and Vibration1070-96221875-92032014-01-01201410.1155/2014/807489807489Dynamic Study of a Capacitive MEMS Switch with Double Clamped-Clamped MicrobeamsHatem Samaali0Fehmi Najar1Slim Choura2Applied Mechanics and Systems Research Laboratory, Tunisia Polytechnic School, University of Carthage, BP 743, 2078 La Marsa, TunisiaApplied Mechanics and Systems Research Laboratory, Tunisia Polytechnic School, University of Carthage, BP 743, 2078 La Marsa, TunisiaResearch Group on Intelligent Machines, National Engineering School of Sfax, University of Sfax, BP 1173, 3038 Sfax, TunisiaWe study a capacitive MEMS switch composed of two clamped-clamped exible microbeams. We first develop a mathematical model for the MEMS switch where the upper microbeam represents the ground transmission line and the lower one represents the central transmission line. An electrostatic force is applied between the two microbeams to yield the switch to its ON and OFF states. We derive the equations of motion of the system and associated boundary conditions and solve the static and dynamic problems using the differential quadratic method. We show that using only nine grid points gives relatively accurate results when compared to those obtained using FEM. We also examine the transient behavior of the microswitch and obtain results indicating that subsequent reduction in actuation voltage, switching time, and power consumption are expected along with relatively good RF performances. ANSYS HFSS simulator is used in this paper to extract the RF characteristics of the microswitch. HFSS simulation results show that the insertion loss is as low as −0.31 dB and that the return loss is better than −12.41 dB at 10 GHz in the ON state. At the OFF state, the isolation is lower than −23 dB in the range of 10 to 50 GHz.http://dx.doi.org/10.1155/2014/807489 |
| spellingShingle | Hatem Samaali Fehmi Najar Slim Choura Dynamic Study of a Capacitive MEMS Switch with Double Clamped-Clamped Microbeams Shock and Vibration |
| title | Dynamic Study of a Capacitive MEMS Switch with Double Clamped-Clamped Microbeams |
| title_full | Dynamic Study of a Capacitive MEMS Switch with Double Clamped-Clamped Microbeams |
| title_fullStr | Dynamic Study of a Capacitive MEMS Switch with Double Clamped-Clamped Microbeams |
| title_full_unstemmed | Dynamic Study of a Capacitive MEMS Switch with Double Clamped-Clamped Microbeams |
| title_short | Dynamic Study of a Capacitive MEMS Switch with Double Clamped-Clamped Microbeams |
| title_sort | dynamic study of a capacitive mems switch with double clamped clamped microbeams |
| url | http://dx.doi.org/10.1155/2014/807489 |
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