Design and Fabrication of a Novel T-Shaped Piezoelectric ZnO Cantilever Sensor
A novel T-shaped piezoelectric ZnO cantilever sensor for chem/bio-detection is designed and fabricated with MEMS technology. By using Rayleigh-Ritz method, the fundamental resonant frequency formula of T-shaped cantilevers is deduced for the first time and is validated by simulation results and expe...
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| Format: | Article |
| Language: | English |
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Wiley
2012-01-01
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| Series: | Active and Passive Electronic Components |
| Online Access: | http://dx.doi.org/10.1155/2012/834961 |
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| author | Kai Yang Zhigang Li Dapeng Chen |
| author_facet | Kai Yang Zhigang Li Dapeng Chen |
| author_sort | Kai Yang |
| collection | DOAJ |
| description | A novel T-shaped piezoelectric ZnO cantilever sensor for chem/bio-detection is designed and fabricated with MEMS technology. By using Rayleigh-Ritz method, the fundamental resonant frequency formula of T-shaped cantilevers is deduced for the first time and is validated by simulation results and experimental results. From this formula, we can easily find the superiority of adopting T-shape for the cantilevers. The complete process of the cantilever sensor is then successfully developed. The cantilever sensor is actuated by a layer of high-quality ZnO film with preferred (002) orientation, which is evaluated by SEM and XRD. The key step of the process is protecting the ZnO film from KOH etching by a novel and effective method, which has rarely appeared in the literature. Finally, this cantilever sensor is measured by a network analyzer, and it has a fundamental resonant frequency of 24.60 kHz. The cantilever sensor developed in this study illustrates the feasibility and potential for many miniaturized sensor applications. |
| format | Article |
| id | doaj-art-d62c0ec35630494f8246340b8824ebd3 |
| institution | Kabale University |
| issn | 0882-7516 1563-5031 |
| language | English |
| publishDate | 2012-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | Active and Passive Electronic Components |
| spelling | doaj-art-d62c0ec35630494f8246340b8824ebd32025-02-03T05:49:36ZengWileyActive and Passive Electronic Components0882-75161563-50312012-01-01201210.1155/2012/834961834961Design and Fabrication of a Novel T-Shaped Piezoelectric ZnO Cantilever SensorKai Yang0Zhigang Li1Dapeng Chen2Institute of Microelectronics, Chinese Academy of Sciences (IMECAS), Beijing 100029, ChinaInstitute of Microelectronics, Chinese Academy of Sciences (IMECAS), Beijing 100029, ChinaInstitute of Microelectronics, Chinese Academy of Sciences (IMECAS), Beijing 100029, ChinaA novel T-shaped piezoelectric ZnO cantilever sensor for chem/bio-detection is designed and fabricated with MEMS technology. By using Rayleigh-Ritz method, the fundamental resonant frequency formula of T-shaped cantilevers is deduced for the first time and is validated by simulation results and experimental results. From this formula, we can easily find the superiority of adopting T-shape for the cantilevers. The complete process of the cantilever sensor is then successfully developed. The cantilever sensor is actuated by a layer of high-quality ZnO film with preferred (002) orientation, which is evaluated by SEM and XRD. The key step of the process is protecting the ZnO film from KOH etching by a novel and effective method, which has rarely appeared in the literature. Finally, this cantilever sensor is measured by a network analyzer, and it has a fundamental resonant frequency of 24.60 kHz. The cantilever sensor developed in this study illustrates the feasibility and potential for many miniaturized sensor applications.http://dx.doi.org/10.1155/2012/834961 |
| spellingShingle | Kai Yang Zhigang Li Dapeng Chen Design and Fabrication of a Novel T-Shaped Piezoelectric ZnO Cantilever Sensor Active and Passive Electronic Components |
| title | Design and Fabrication of a Novel T-Shaped Piezoelectric ZnO Cantilever Sensor |
| title_full | Design and Fabrication of a Novel T-Shaped Piezoelectric ZnO Cantilever Sensor |
| title_fullStr | Design and Fabrication of a Novel T-Shaped Piezoelectric ZnO Cantilever Sensor |
| title_full_unstemmed | Design and Fabrication of a Novel T-Shaped Piezoelectric ZnO Cantilever Sensor |
| title_short | Design and Fabrication of a Novel T-Shaped Piezoelectric ZnO Cantilever Sensor |
| title_sort | design and fabrication of a novel t shaped piezoelectric zno cantilever sensor |
| url | http://dx.doi.org/10.1155/2012/834961 |
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