Design and Fabrication of a Novel T-Shaped Piezoelectric ZnO Cantilever Sensor
A novel T-shaped piezoelectric ZnO cantilever sensor for chem/bio-detection is designed and fabricated with MEMS technology. By using Rayleigh-Ritz method, the fundamental resonant frequency formula of T-shaped cantilevers is deduced for the first time and is validated by simulation results and expe...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2012-01-01
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| Series: | Active and Passive Electronic Components |
| Online Access: | http://dx.doi.org/10.1155/2012/834961 |
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| Summary: | A novel T-shaped piezoelectric ZnO cantilever sensor for chem/bio-detection is designed and fabricated with MEMS technology. By using Rayleigh-Ritz method, the fundamental resonant frequency formula of T-shaped cantilevers is deduced for the first time and is validated by simulation results and experimental results. From this formula, we can easily find the superiority of adopting T-shape for the cantilevers. The complete process of the cantilever sensor is then successfully developed. The cantilever sensor is actuated by a layer of high-quality ZnO film with preferred (002) orientation, which is evaluated by SEM and XRD. The key step of the process is protecting the ZnO film from KOH etching by a novel and effective method, which has rarely appeared in the literature. Finally, this cantilever sensor is measured by a network analyzer, and it has a fundamental resonant frequency of 24.60 kHz. The cantilever sensor developed in this study illustrates the feasibility and potential for many miniaturized sensor applications. |
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| ISSN: | 0882-7516 1563-5031 |