Evolution of the oxidation of V zigzag nanostructures on Si: Prime conditions to reach uniform thermochromic VO2(M) thin films
This article reports on the oxidation of 100 nm-thick vanadium layers achieved by sputtering glancing-angle deposition on silicon, with opposite oblique columns creating a zigzag-like morphology, using a small overpressure continuous flow of air and an infrared lamps furnace. In addition, the study...
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Elsevier
2025-01-01
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| Series: | Applied Surface Science Advances |
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| Online Access: | http://www.sciencedirect.com/science/article/pii/S2666523925000017 |
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| author | F.M. Morales J.J. Jiménez N. Martin R. Alcántara J. Navas R. García A.J. Santos |
| author_facet | F.M. Morales J.J. Jiménez N. Martin R. Alcántara J. Navas R. García A.J. Santos |
| author_sort | F.M. Morales |
| collection | DOAJ |
| description | This article reports on the oxidation of 100 nm-thick vanadium layers achieved by sputtering glancing-angle deposition on silicon, with opposite oblique columns creating a zigzag-like morphology, using a small overpressure continuous flow of air and an infrared lamps furnace. In addition, the study focuses on the stepwise investigation of the nanostructure and the oxidation progress of the layer by electron microscopy, verifying a monotonic incorporation of oxygen with time, which results in a linear rise of the VOx overlayer volumes. This characterization is correlated with Raman spectra quickly collected in a wide wavenumber range. In consequence, we claim a methodology based on the comparisson of the relative intensities of such Raman bands to track the kinetic dynamics of these systems, evidencing the participation of three main phases: VO2(M) alone or mixed with either V or V2O5. For the optimum conditions, high-quality vanadium dioxide layers are achieved, attending to their nanostructure and outstanding optical response (over 90% of relative transmittance modulation at a wavelength of 3000 nm). Vis-NIR spectrophotometry and Raman spectroscopy, both carried out at variable temperature, allow exploring the different thermochromic characteristics of the samples at different oxidation stages. |
| format | Article |
| id | doaj-art-d4f981ea8fb14f0ea9514ae682143392 |
| institution | Kabale University |
| issn | 2666-5239 |
| language | English |
| publishDate | 2025-01-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Applied Surface Science Advances |
| spelling | doaj-art-d4f981ea8fb14f0ea9514ae6821433922025-01-29T05:02:12ZengElsevierApplied Surface Science Advances2666-52392025-01-0125100692Evolution of the oxidation of V zigzag nanostructures on Si: Prime conditions to reach uniform thermochromic VO2(M) thin filmsF.M. Morales0J.J. Jiménez1N. Martin2R. Alcántara3J. Navas4R. García5A.J. Santos6IMEYMAT: Institute of Research on Electron Microscopy and Materials of the University of Cádiz, E-11510, Puerto Real, Spain; Department of Materials Science and Metallurgic Engineering and Inorganic Chemistry, Faculty of Sciences, University of Cádiz, E-11510, Puerto Real, Spain; Corresponding authors.IMEYMAT: Institute of Research on Electron Microscopy and Materials of the University of Cádiz, E-11510, Puerto Real, Spain; Department of Materials Science and Metallurgic Engineering and Inorganic Chemistry, Faculty of Sciences, University of Cádiz, E-11510, Puerto Real, SpainSUPMICROTECH, CNRS, Institut FEMTO-ST, F-25000, Besançon Cedex, FranceIMEYMAT: Institute of Research on Electron Microscopy and Materials of the University of Cádiz, E-11510, Puerto Real, Spain; Department of Physical Chemistry, Faculty of Sciences, University of Cádiz, E-11510, Puerto Real, SpainIMEYMAT: Institute of Research on Electron Microscopy and Materials of the University of Cádiz, E-11510, Puerto Real, Spain; Department of Physical Chemistry, Faculty of Sciences, University of Cádiz, E-11510, Puerto Real, SpainIMEYMAT: Institute of Research on Electron Microscopy and Materials of the University of Cádiz, E-11510, Puerto Real, Spain; Department of Materials Science and Metallurgic Engineering and Inorganic Chemistry, Faculty of Sciences, University of Cádiz, E-11510, Puerto Real, SpainIMEYMAT: Institute of Research on Electron Microscopy and Materials of the University of Cádiz, E-11510, Puerto Real, Spain; Department of Materials Science and Metallurgic Engineering and Inorganic Chemistry, Faculty of Sciences, University of Cádiz, E-11510, Puerto Real, Spain; SUPMICROTECH, CNRS, Institut FEMTO-ST, F-25000, Besançon Cedex, France; Corresponding authors.This article reports on the oxidation of 100 nm-thick vanadium layers achieved by sputtering glancing-angle deposition on silicon, with opposite oblique columns creating a zigzag-like morphology, using a small overpressure continuous flow of air and an infrared lamps furnace. In addition, the study focuses on the stepwise investigation of the nanostructure and the oxidation progress of the layer by electron microscopy, verifying a monotonic incorporation of oxygen with time, which results in a linear rise of the VOx overlayer volumes. This characterization is correlated with Raman spectra quickly collected in a wide wavenumber range. In consequence, we claim a methodology based on the comparisson of the relative intensities of such Raman bands to track the kinetic dynamics of these systems, evidencing the participation of three main phases: VO2(M) alone or mixed with either V or V2O5. For the optimum conditions, high-quality vanadium dioxide layers are achieved, attending to their nanostructure and outstanding optical response (over 90% of relative transmittance modulation at a wavelength of 3000 nm). Vis-NIR spectrophotometry and Raman spectroscopy, both carried out at variable temperature, allow exploring the different thermochromic characteristics of the samples at different oxidation stages.http://www.sciencedirect.com/science/article/pii/S2666523925000017Vanadium oxidationVanadium dioxide synthesisGlancing angle depositionFlash lamp annealingElectron microscopyRaman spectroscopy |
| spellingShingle | F.M. Morales J.J. Jiménez N. Martin R. Alcántara J. Navas R. García A.J. Santos Evolution of the oxidation of V zigzag nanostructures on Si: Prime conditions to reach uniform thermochromic VO2(M) thin films Applied Surface Science Advances Vanadium oxidation Vanadium dioxide synthesis Glancing angle deposition Flash lamp annealing Electron microscopy Raman spectroscopy |
| title | Evolution of the oxidation of V zigzag nanostructures on Si: Prime conditions to reach uniform thermochromic VO2(M) thin films |
| title_full | Evolution of the oxidation of V zigzag nanostructures on Si: Prime conditions to reach uniform thermochromic VO2(M) thin films |
| title_fullStr | Evolution of the oxidation of V zigzag nanostructures on Si: Prime conditions to reach uniform thermochromic VO2(M) thin films |
| title_full_unstemmed | Evolution of the oxidation of V zigzag nanostructures on Si: Prime conditions to reach uniform thermochromic VO2(M) thin films |
| title_short | Evolution of the oxidation of V zigzag nanostructures on Si: Prime conditions to reach uniform thermochromic VO2(M) thin films |
| title_sort | evolution of the oxidation of v zigzag nanostructures on si prime conditions to reach uniform thermochromic vo2 m thin films |
| topic | Vanadium oxidation Vanadium dioxide synthesis Glancing angle deposition Flash lamp annealing Electron microscopy Raman spectroscopy |
| url | http://www.sciencedirect.com/science/article/pii/S2666523925000017 |
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