Eliminating nanometer-scale asperities on metallic thin films through plasma modification processes studied by molecular dynamics and AFM
Abstract We report the effects of reducing surface asperity size at the nanometer scale on metallic surfaces by plasma-assisted surface modification processes using simulations and experiments. Molecular dynamics (MD) simulations were conducted by irradiating various inert gas ions (Ne, Ar, Kr, and...
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| Main Authors: | , , , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Portfolio
2025-04-01
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| Series: | Scientific Reports |
| Online Access: | https://doi.org/10.1038/s41598-025-92095-5 |
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