Solid‐Solution Limits and Thorough Characterization of Bulk β‐(AlxGa1‐x)2O Single Crystals Grown by the Czochralski Method

Abstract With comprehensive crystal growth experiments of β‐(AlxGa1‐x)2O3 by the Czochralski method this work concludes a maximum [Al] = 40 mol% (35 mol% in the melt) that can be incorporated into β‐Ga2O3 crystal lattice while keeping single crystalline and monoclinic phase, resulting in the formula...

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Main Authors: Zbigniew Galazka, Andreas Fiedler, Andreas Popp, Palvan Seyidov, Saud Bin Anooz, Roberts Blukis, Jana Rehm, Kornelius Tetzner, Mike Pietsch, Andrea Dittmar, Steffen Ganschow, Arub Akhtar, Thilo Remmele, Martin Albrecht, Tobias Schulz, Ta‐Shun Chou, Albert Kwasniewski, Manuela Suendermann, Thomas Schroeder, Matthias Bickermann
Format: Article
Language:English
Published: Wiley-VCH 2025-01-01
Series:Advanced Materials Interfaces
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Online Access:https://doi.org/10.1002/admi.202400122
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author Zbigniew Galazka
Andreas Fiedler
Andreas Popp
Palvan Seyidov
Saud Bin Anooz
Roberts Blukis
Jana Rehm
Kornelius Tetzner
Mike Pietsch
Andrea Dittmar
Steffen Ganschow
Arub Akhtar
Thilo Remmele
Martin Albrecht
Tobias Schulz
Ta‐Shun Chou
Albert Kwasniewski
Manuela Suendermann
Thomas Schroeder
Matthias Bickermann
author_facet Zbigniew Galazka
Andreas Fiedler
Andreas Popp
Palvan Seyidov
Saud Bin Anooz
Roberts Blukis
Jana Rehm
Kornelius Tetzner
Mike Pietsch
Andrea Dittmar
Steffen Ganschow
Arub Akhtar
Thilo Remmele
Martin Albrecht
Tobias Schulz
Ta‐Shun Chou
Albert Kwasniewski
Manuela Suendermann
Thomas Schroeder
Matthias Bickermann
author_sort Zbigniew Galazka
collection DOAJ
description Abstract With comprehensive crystal growth experiments of β‐(AlxGa1‐x)2O3 by the Czochralski method this work concludes a maximum [Al] = 40 mol% (35 mol% in the melt) that can be incorporated into β‐Ga2O3 crystal lattice while keeping single crystalline and monoclinic phase, resulting in the formula of β‐(Al0.4Ga0.6)2O3. Transmission Electron Microscopy (TEM) analysis reveals random distribution of Al across both octahedral and tetrahedral sites. This work has shown, that incorporation of only [Ga] ≥ 5 mol% into α‐Al2O3 crystals leads to a phase separation of (α + θ)‐Al2O3. With electrical measurements this work proves an increase of the electrical resistivity of β‐(AlxGa1‐x)2O3:Mg as compared to β‐Ga2O3:Mg. The static dielectric constant and refractive index both decrease with [Al]. Raman spectra shows a continuous shift and broadening of the peaks, with the low energy optical phonons Ag(3) having a large contribution to a decrease in the electron mobility. Further, Ir incorporation into the crystals decreases with [Al], wherein Ir4+ Raman peak disappears already at [Al] ≥ 15 mol%. Finally, thermal conductivity measurements on β‐(AlxGa1‐x)2O3 crystals show a drastic decrease of its values with [Al], to about 1/3 of the β‐Ga2O3 value at [Al] = 30 mol%.
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spelling doaj-art-d416251160824eb5bb7ae653d91d16bb2025-01-20T13:56:18ZengWiley-VCHAdvanced Materials Interfaces2196-73502025-01-01122n/an/a10.1002/admi.202400122Solid‐Solution Limits and Thorough Characterization of Bulk β‐(AlxGa1‐x)2O Single Crystals Grown by the Czochralski MethodZbigniew Galazka0Andreas Fiedler1Andreas Popp2Palvan Seyidov3Saud Bin Anooz4Roberts Blukis5Jana Rehm6Kornelius Tetzner7Mike Pietsch8Andrea Dittmar9Steffen Ganschow10Arub Akhtar11Thilo Remmele12Martin Albrecht13Tobias Schulz14Ta‐Shun Chou15Albert Kwasniewski16Manuela Suendermann17Thomas Schroeder18Matthias Bickermann19Leibniz‐Institut für Kristallzüchtung Max‐Born‐Str. 2 12489 Berlin GermanyLeibniz‐Institut für Kristallzüchtung Max‐Born‐Str. 2 12489 Berlin GermanyLeibniz‐Institut für Kristallzüchtung Max‐Born‐Str. 2 12489 Berlin GermanyLeibniz‐Institut für Kristallzüchtung Max‐Born‐Str. 2 12489 Berlin GermanyLeibniz‐Institut für Kristallzüchtung Max‐Born‐Str. 2 12489 Berlin GermanyLeibniz‐Institut für Kristallzüchtung Max‐Born‐Str. 2 12489 Berlin GermanyLeibniz‐Institut für Kristallzüchtung Max‐Born‐Str. 2 12489 Berlin GermanyFerdinand‐Braun‐Institut Leibniz‐Institut für Höchstfrequenztechnik Gustav‐Kirchhoff‐Straße 4 12489 Berlin GermanyLeibniz‐Institut für Kristallzüchtung Max‐Born‐Str. 2 12489 Berlin GermanyLeibniz‐Institut für Kristallzüchtung Max‐Born‐Str. 2 12489 Berlin GermanyLeibniz‐Institut für Kristallzüchtung Max‐Born‐Str. 2 12489 Berlin GermanyLeibniz‐Institut für Kristallzüchtung Max‐Born‐Str. 2 12489 Berlin GermanyLeibniz‐Institut für Kristallzüchtung Max‐Born‐Str. 2 12489 Berlin GermanyLeibniz‐Institut für Kristallzüchtung Max‐Born‐Str. 2 12489 Berlin GermanyLeibniz‐Institut für Kristallzüchtung Max‐Born‐Str. 2 12489 Berlin GermanyLeibniz‐Institut für Kristallzüchtung Max‐Born‐Str. 2 12489 Berlin GermanyLeibniz‐Institut für Kristallzüchtung Max‐Born‐Str. 2 12489 Berlin GermanyLeibniz‐Institut für Kristallzüchtung Max‐Born‐Str. 2 12489 Berlin GermanyLeibniz‐Institut für Kristallzüchtung Max‐Born‐Str. 2 12489 Berlin GermanyLeibniz‐Institut für Kristallzüchtung Max‐Born‐Str. 2 12489 Berlin GermanyAbstract With comprehensive crystal growth experiments of β‐(AlxGa1‐x)2O3 by the Czochralski method this work concludes a maximum [Al] = 40 mol% (35 mol% in the melt) that can be incorporated into β‐Ga2O3 crystal lattice while keeping single crystalline and monoclinic phase, resulting in the formula of β‐(Al0.4Ga0.6)2O3. Transmission Electron Microscopy (TEM) analysis reveals random distribution of Al across both octahedral and tetrahedral sites. This work has shown, that incorporation of only [Ga] ≥ 5 mol% into α‐Al2O3 crystals leads to a phase separation of (α + θ)‐Al2O3. With electrical measurements this work proves an increase of the electrical resistivity of β‐(AlxGa1‐x)2O3:Mg as compared to β‐Ga2O3:Mg. The static dielectric constant and refractive index both decrease with [Al]. Raman spectra shows a continuous shift and broadening of the peaks, with the low energy optical phonons Ag(3) having a large contribution to a decrease in the electron mobility. Further, Ir incorporation into the crystals decreases with [Al], wherein Ir4+ Raman peak disappears already at [Al] ≥ 15 mol%. Finally, thermal conductivity measurements on β‐(AlxGa1‐x)2O3 crystals show a drastic decrease of its values with [Al], to about 1/3 of the β‐Ga2O3 value at [Al] = 30 mol%.https://doi.org/10.1002/admi.202400122bulk Î2‐(AlxGa1‐x)2O3 single crystalCzochralski methoddopingphysical propertieswafers
spellingShingle Zbigniew Galazka
Andreas Fiedler
Andreas Popp
Palvan Seyidov
Saud Bin Anooz
Roberts Blukis
Jana Rehm
Kornelius Tetzner
Mike Pietsch
Andrea Dittmar
Steffen Ganschow
Arub Akhtar
Thilo Remmele
Martin Albrecht
Tobias Schulz
Ta‐Shun Chou
Albert Kwasniewski
Manuela Suendermann
Thomas Schroeder
Matthias Bickermann
Solid‐Solution Limits and Thorough Characterization of Bulk β‐(AlxGa1‐x)2O Single Crystals Grown by the Czochralski Method
Advanced Materials Interfaces
bulk Î2‐(AlxGa1‐x)2O3 single crystal
Czochralski method
doping
physical properties
wafers
title Solid‐Solution Limits and Thorough Characterization of Bulk β‐(AlxGa1‐x)2O Single Crystals Grown by the Czochralski Method
title_full Solid‐Solution Limits and Thorough Characterization of Bulk β‐(AlxGa1‐x)2O Single Crystals Grown by the Czochralski Method
title_fullStr Solid‐Solution Limits and Thorough Characterization of Bulk β‐(AlxGa1‐x)2O Single Crystals Grown by the Czochralski Method
title_full_unstemmed Solid‐Solution Limits and Thorough Characterization of Bulk β‐(AlxGa1‐x)2O Single Crystals Grown by the Czochralski Method
title_short Solid‐Solution Limits and Thorough Characterization of Bulk β‐(AlxGa1‐x)2O Single Crystals Grown by the Czochralski Method
title_sort solid solution limits and thorough characterization of bulk β alxga1 x 2o single crystals grown by the czochralski method
topic bulk Î2‐(AlxGa1‐x)2O3 single crystal
Czochralski method
doping
physical properties
wafers
url https://doi.org/10.1002/admi.202400122
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