Chen, K., Zheng, D., Gao, J., Wang, H., & Wang, B. Progress in the Sputtering Preparation of Hf0.5Zr0.5O2 Ferroelectric Films and Memories. Wiley-VCH.
Chicago Style (17th ed.) CitationChen, Kun, Dan Zheng, Jie Gao, Hao Wang, and Baoyuan Wang. Progress in the Sputtering Preparation of Hf0.5Zr0.5O2 Ferroelectric Films and Memories. Wiley-VCH.
MLA (9th ed.) CitationChen, Kun, et al. Progress in the Sputtering Preparation of Hf0.5Zr0.5O2 Ferroelectric Films and Memories. Wiley-VCH.
Warning: These citations may not always be 100% accurate.