Analytic Model of Microcantilevers as Low Frequency Generator
Finite element method (FEM) based simulation has been carried out, and an analytic model of microcantilevers using piezoelectric excitations is proposed. The model is based on the type of the selected material and geometry of the structure. The investigations are carried out with rectangular microca...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2014-01-01
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| Series: | Modelling and Simulation in Engineering |
| Online Access: | http://dx.doi.org/10.1155/2014/897315 |
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| Summary: | Finite element method (FEM) based simulation has been carried out, and an analytic model of microcantilevers using piezoelectric excitations is proposed. The model is based on the type of the selected material and geometry of the structure. The investigations are carried out with rectangular microcantilevers using silicon as the substrate. The high frequency analytic signals are applied to the input piezoelectric electrodes, and the resultant signal generated at the output piezoelectric electrode is recorded and analyzed. The analysis of the results showed that the proposed system is capable of generating a low frequency signal. Two microcantilevers with different dimensional aspects are used, and the results verified the application of microcantilever array as a low frequency signal generator. |
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| ISSN: | 1687-5591 1687-5605 |