Structural Properties and Elemental Composition of Au+ Implanted ZnO Films, Obtained by Sol-gel Method
The undoped and doped aluminum ZnO films were obtained by sol-gel method onto glass substrates with further implantation of Au+ ions. RBS, XRD methods and Raman spectroscopy were used for films characterization. The XRD analysis showed that obtained samples have a hexagonal structure with lattice co...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2014-06-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2014/2/articles/jnep_2014_V6_02003.pdf |
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| Summary: | The undoped and doped aluminum ZnO films were obtained by sol-gel method onto glass substrates with further implantation of Au+ ions. RBS, XRD methods and Raman spectroscopy were used for films characterization. The XRD analysis showed that obtained samples have a hexagonal structure with lattice constants a 0.3245-0.3249 nm, c 0.5203-0.5204 nm, c / a 1.602-1.603 and growth texture [101]. The values of coherent scattering domains (CSD) were equal to L(201) (13.0-13.9) nm, L(101) (12.0-12.2) nm, L(002) (11.3-12.6) nm. It is found that there is not observed the effects of Au+ implantation on the values of CSD, lattice constants and texture of the films. According to X-ray analysis ions of gold in the films are mainly incorporated in the form of phase of AuZn3. |
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| ISSN: | 2077-6772 |