Sensors on Flapping Wings (SOFWs) Using Complementary Metal–Oxide–Semiconductor (CMOS) MEMS Technology
This article presents a framework of using MEMS sensors to investigate unsteady flow speeds of a flapping wing or the new concept of sensors on flapping wings (SOFWs). Based on the implemented self-heating flow sensor using U18 complementary metal–oxide–semiconductor (CMOS) MEMS foundry provided by...
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| Format: | Article |
| Language: | English |
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MDPI AG
2025-01-01
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| Series: | Eng |
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| Online Access: | https://www.mdpi.com/2673-4117/6/1/15 |
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| author | Lung-Jieh Yang Wei-Cheng Wang Chandrashekhar Tasupalli Balasubramanian Esakki Mahammed Inthiyaz Shaik |
| author_facet | Lung-Jieh Yang Wei-Cheng Wang Chandrashekhar Tasupalli Balasubramanian Esakki Mahammed Inthiyaz Shaik |
| author_sort | Lung-Jieh Yang |
| collection | DOAJ |
| description | This article presents a framework of using MEMS sensors to investigate unsteady flow speeds of a flapping wing or the new concept of sensors on flapping wings (SOFWs). Based on the implemented self-heating flow sensor using U18 complementary metal–oxide–semiconductor (CMOS) MEMS foundry provided by the Taiwan Semiconductor Research Institute (TSRI), the compact sensing region of the flow sensor was incorporated for in situ diagnostics of biomimetic flapping issues. The sensitivity of the CMOS MEMS flow sensor, packaged with a parylene coating of 10 μm thick to prolong the lifetime, was observed as −3.24 mV/V/(m/s), which was below the flow speed of 6 m/s. A comprehensive investigation was conducted on integrating CMOS MEMS flow sensors on the leading edge of the mean aerodynamic chord (m.a.c.) of the flexible 70-cm-span flapping wings. The interpreted flow speed signals were checked and demonstrated similar behavior with the (net) thrust force exerted on the flapping wing, as measured in the wind tunnel experiments using the force gauge. The experimental results confirm that the in situ measurements using the concept of SOFWs can be useful for measuring the aerodynamic forces of flapping wings effectively, and it can also serve for future potential applications. |
| format | Article |
| id | doaj-art-c8a25b74681640918aa76d57f42dab3e |
| institution | Kabale University |
| issn | 2673-4117 |
| language | English |
| publishDate | 2025-01-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Eng |
| spelling | doaj-art-c8a25b74681640918aa76d57f42dab3e2025-01-24T13:31:35ZengMDPI AGEng2673-41172025-01-01611510.3390/eng6010015Sensors on Flapping Wings (SOFWs) Using Complementary Metal–Oxide–Semiconductor (CMOS) MEMS TechnologyLung-Jieh Yang0Wei-Cheng Wang1Chandrashekhar Tasupalli2Balasubramanian Esakki3Mahammed Inthiyaz Shaik4Department of Mechanical and Electromechanical Engineering, Tamkang University, New Taipei City 251, TaiwanDepartment of Mechanical and Electromechanical Engineering, Tamkang University, New Taipei City 251, TaiwanDepartment of Mechanical and Electromechanical Engineering, Tamkang University, New Taipei City 251, TaiwanDepartment of Mechanical Engineering, National Institute of Teaching Teachers Training and Research, Chennai 600113, IndiaDepartment of Mechanical and Electromechanical Engineering, Tamkang University, New Taipei City 251, TaiwanThis article presents a framework of using MEMS sensors to investigate unsteady flow speeds of a flapping wing or the new concept of sensors on flapping wings (SOFWs). Based on the implemented self-heating flow sensor using U18 complementary metal–oxide–semiconductor (CMOS) MEMS foundry provided by the Taiwan Semiconductor Research Institute (TSRI), the compact sensing region of the flow sensor was incorporated for in situ diagnostics of biomimetic flapping issues. The sensitivity of the CMOS MEMS flow sensor, packaged with a parylene coating of 10 μm thick to prolong the lifetime, was observed as −3.24 mV/V/(m/s), which was below the flow speed of 6 m/s. A comprehensive investigation was conducted on integrating CMOS MEMS flow sensors on the leading edge of the mean aerodynamic chord (m.a.c.) of the flexible 70-cm-span flapping wings. The interpreted flow speed signals were checked and demonstrated similar behavior with the (net) thrust force exerted on the flapping wing, as measured in the wind tunnel experiments using the force gauge. The experimental results confirm that the in situ measurements using the concept of SOFWs can be useful for measuring the aerodynamic forces of flapping wings effectively, and it can also serve for future potential applications.https://www.mdpi.com/2673-4117/6/1/15sensors on flapping wings (SOFWs)flow sensorCMOS MEMSflapping wing |
| spellingShingle | Lung-Jieh Yang Wei-Cheng Wang Chandrashekhar Tasupalli Balasubramanian Esakki Mahammed Inthiyaz Shaik Sensors on Flapping Wings (SOFWs) Using Complementary Metal–Oxide–Semiconductor (CMOS) MEMS Technology Eng sensors on flapping wings (SOFWs) flow sensor CMOS MEMS flapping wing |
| title | Sensors on Flapping Wings (SOFWs) Using Complementary Metal–Oxide–Semiconductor (CMOS) MEMS Technology |
| title_full | Sensors on Flapping Wings (SOFWs) Using Complementary Metal–Oxide–Semiconductor (CMOS) MEMS Technology |
| title_fullStr | Sensors on Flapping Wings (SOFWs) Using Complementary Metal–Oxide–Semiconductor (CMOS) MEMS Technology |
| title_full_unstemmed | Sensors on Flapping Wings (SOFWs) Using Complementary Metal–Oxide–Semiconductor (CMOS) MEMS Technology |
| title_short | Sensors on Flapping Wings (SOFWs) Using Complementary Metal–Oxide–Semiconductor (CMOS) MEMS Technology |
| title_sort | sensors on flapping wings sofws using complementary metal oxide semiconductor cmos mems technology |
| topic | sensors on flapping wings (SOFWs) flow sensor CMOS MEMS flapping wing |
| url | https://www.mdpi.com/2673-4117/6/1/15 |
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