Application of Semiconductor Technology for Piezoelectric Energy Harvester Fabrication
In this paper, we propose the application of semiconductor technology processes to fabricate integrated silicon devices that demonstrate the piezoelectric energy harvesting effect. The harvesting structure converts thermal energy into electricity using a piezoelectric transducer, which generates ele...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-11-01
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| Series: | Energies |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1996-1073/17/23/5896 |
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