Structural and Electrical Characterization of Hf0.5Zr0.5O2 Thin Films Crystallized by Rapid Thermal Annealing

Structural and Electrical Characterization of Hf0.5Zr0.5O2 Thin Films Crystallized by Rapid Thermal Annealing

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Bibliographic Details
Main Authors:	Park Jucheol, Park Yeong Gyeong, Kang Min-Ho, Lee Myung-Keun, Hyun Moon Seop
Format:	Article
Language:	English
Published:	EDP Sciences 2024-01-01
Series:	BIO Web of Conferences
Subjects:	hf0.5zr0.5o2 ferroelectricity hr-stem efm
Online Access:	https://www.bio-conferences.org/articles/bioconf/pdf/2024/48/bioconf_emc2024_24040.pdf
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