Power Transfer Efficiency in The Inductive RF Ion Source
A radio-frequency inductive ion source without magnetic field was analyzed at driving frequency of 27,12 MHz. Diameter of the source discharge chamber is 3 cm, length is 8 cm. External electrical parameters of a source such as the coil current and the coil voltage were measured over a power range of...
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| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2010-01-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2010/2/articles/en/jnep_eng_2010_V2_N2_075-082.pdf |
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