Feature extraction and spatial imaging of synchrotron radiation X-ray diffraction patterns using unsupervised machine learning

Feature extraction and spatial imaging of synchrotron radiation X-ray diffraction patterns using unsupervised machine learning

We analyzed a number of complicated X-ray diffraction patterns using feature patterns obtained through unsupervised machine learning. A crystalline SiGe film on a Si substrate with a spatial fluctuation in both composition and crystal orientation was tested as a model sample having complicated X-ray...

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Bibliographic Details
Main Authors: Kentaro Kutsukake, Takefumi Kamioka, Kota Matsui, Ichiro Takeuchi, Takashi Segi, Takuo Sasaki, Seiji Fujikawa, Masamitu Takahasi
Format: Article
Language:English
Published: Taylor & Francis Group 2024-12-01
Series:Science and Technology of Advanced Materials: Methods
Subjects:
X-ray diffraction pattern
machine learning
non-negative matrix factorization
micro beam mapping
synchrotron radiation
Online Access:https://www.tandfonline.com/doi/10.1080/27660400.2024.2336402
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