Advancements in lamb wave high-frequency devices using diamond-like carbon (DLC) coatings
Diamond-like carbon (DLC) stands as a material of profound scientific and technological importance, owing to its exceptional blend of mechanical, tribological, and chemical properties. Lamb wave devices, vital in sensing, communication, and structural health monitoring, require efficient surface aco...
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Elsevier
2025-06-01
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| Series: | Chemical Physics Impact |
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| Online Access: | http://www.sciencedirect.com/science/article/pii/S2667022425000210 |
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| author | Jatinder Pal Singh Ajay Kumar Sao Babita Sharma Satyam Garg Anjali Sharma Reema Gupta Lokesh Rana Mallika Verma Akhilesh Pandey Archibald Theodore Nimal Upendra Mittal Amit Kumar Vishwakarma Monika Tomar Arijit Chowdhuri |
| author_facet | Jatinder Pal Singh Ajay Kumar Sao Babita Sharma Satyam Garg Anjali Sharma Reema Gupta Lokesh Rana Mallika Verma Akhilesh Pandey Archibald Theodore Nimal Upendra Mittal Amit Kumar Vishwakarma Monika Tomar Arijit Chowdhuri |
| author_sort | Jatinder Pal Singh |
| collection | DOAJ |
| description | Diamond-like carbon (DLC) stands as a material of profound scientific and technological importance, owing to its exceptional blend of mechanical, tribological, and chemical properties. Lamb wave devices, vital in sensing, communication, and structural health monitoring, require efficient surface acoustic wave (SAW) propagation for their diverse applications. Theoretical studies suggest that DLC coatings can accelerate SAWs due to their high elastic constant and low mass density, making them highly desirable for enhancing SAW device performance. In the present work, a process for reliable deposition of DLC films on the SiO2/Si membrane has been investigated, aiming to optimize their functionality. MEMS (micro-electromechanical system) technology was adopted for the development of SiO2/Si membrane-based Lamb wave devices utilising piezoelectric ZnO thin film and high-velocity DLC coating. The DLC films were coated on the SiO2/Si membrane using the Hot Filament Chemical Vapor Deposition (HFCVD) method followed by deposition of a piezoelectric layer of ZnO film through RF magnetron sputtering. The patterning of aluminium electrodes for the fabrication of Lamb wave devices was carried out using lithography. The frequency response of the Lamb wave devices prepared without and with DLC coatings was studied and it was found that the Lamb wave devices without DLC coatings showed a return loss of -27.97 dB at a frequency of 286 MHz. However, with the incorporation of DLC coating, the frequency increased to 345 MHz with a lower return loss of -19.46 dB. The outcomes of this research underscore the potential of DLC coatings to optimize the Lamb wave device functionalities, promising enhanced performance and broader applications. Continued exploration and refinement in this field hold promise for further enhancing DLC coatings and broadening the scope of Lamb wave device applications. |
| format | Article |
| id | doaj-art-c382ec14bc6e405a81edc699b80961dd |
| institution | Kabale University |
| issn | 2667-0224 |
| language | English |
| publishDate | 2025-06-01 |
| publisher | Elsevier |
| record_format | Article |
| series | Chemical Physics Impact |
| spelling | doaj-art-c382ec14bc6e405a81edc699b80961dd2025-01-27T04:22:29ZengElsevierChemical Physics Impact2667-02242025-06-0110100833Advancements in lamb wave high-frequency devices using diamond-like carbon (DLC) coatingsJatinder Pal Singh0Ajay Kumar Sao1Babita Sharma2Satyam Garg3Anjali Sharma4Reema Gupta5Lokesh Rana6Mallika Verma7Akhilesh Pandey8Archibald Theodore Nimal9Upendra Mittal10Amit Kumar Vishwakarma11Monika Tomar12Arijit Chowdhuri13Department of Physics and Astrophysics, University of Delhi, Delhi, 110007, India; Department of Physics, Acharya Narendra Dev College (University of Delhi), Kalkaji, Govindpuri, New Delhi, 110019, IndiaDepartment of Physics and Astrophysics, University of Delhi, Delhi, 110007, India; Department of Physics, Acharya Narendra Dev College (University of Delhi), Kalkaji, Govindpuri, New Delhi, 110019, IndiaDepartment of Physics and Astrophysics, University of Delhi, Delhi, 110007, India; Department of Physics, Miranda House (University of Delhi), Delhi , 110007, IndiaDepartment of Physics and Astrophysics, University of Delhi, Delhi, 110007, India; Department of Physics, Miranda House (University of Delhi), Delhi , 110007, IndiaDepartment of Physics, Atma Ram Sanatan Dharma College (University of Delhi), Dhaula Kuan, New Delhi, 110021, IndiaDepartment of Physics, Hindu College (University of Delhi), Delhi, 110007, IndiaDepartment of Physics, Zakir Husain Delhi College (University of Delhi), Delhi, 110002, IndiaDepartment of Physics, Miranda House (University of Delhi), Delhi , 110007, IndiaSolid State Physics Laboratory (DRDO), Lucknow Road, Timarpur, Delhi, 110054, IndiaSolid State Physics Laboratory (DRDO), Lucknow Road, Timarpur, Delhi, 110054, IndiaSolid State Physics Laboratory (DRDO), Lucknow Road, Timarpur, Delhi, 110054, IndiaSolid State Physics Laboratory (DRDO), Lucknow Road, Timarpur, Delhi, 110054, IndiaDepartment of Physics, Miranda House (University of Delhi), Delhi , 110007, IndiaDepartment of Physics, Acharya Narendra Dev College (University of Delhi), Kalkaji, Govindpuri, New Delhi, 110019, India; Corresponding author at: Sensing Materials & Devices Laboratory, Acharya Narendra Dev College (University of Delhi), Kalkaji, Govindpuri, New Delhi, 110019, India.Diamond-like carbon (DLC) stands as a material of profound scientific and technological importance, owing to its exceptional blend of mechanical, tribological, and chemical properties. Lamb wave devices, vital in sensing, communication, and structural health monitoring, require efficient surface acoustic wave (SAW) propagation for their diverse applications. Theoretical studies suggest that DLC coatings can accelerate SAWs due to their high elastic constant and low mass density, making them highly desirable for enhancing SAW device performance. In the present work, a process for reliable deposition of DLC films on the SiO2/Si membrane has been investigated, aiming to optimize their functionality. MEMS (micro-electromechanical system) technology was adopted for the development of SiO2/Si membrane-based Lamb wave devices utilising piezoelectric ZnO thin film and high-velocity DLC coating. The DLC films were coated on the SiO2/Si membrane using the Hot Filament Chemical Vapor Deposition (HFCVD) method followed by deposition of a piezoelectric layer of ZnO film through RF magnetron sputtering. The patterning of aluminium electrodes for the fabrication of Lamb wave devices was carried out using lithography. The frequency response of the Lamb wave devices prepared without and with DLC coatings was studied and it was found that the Lamb wave devices without DLC coatings showed a return loss of -27.97 dB at a frequency of 286 MHz. However, with the incorporation of DLC coating, the frequency increased to 345 MHz with a lower return loss of -19.46 dB. The outcomes of this research underscore the potential of DLC coatings to optimize the Lamb wave device functionalities, promising enhanced performance and broader applications. Continued exploration and refinement in this field hold promise for further enhancing DLC coatings and broadening the scope of Lamb wave device applications.http://www.sciencedirect.com/science/article/pii/S2667022425000210Lamb waveSurface acoustic waveDiamond like carbonZinc oxideHot filament chemical vapor deposition (HFCVD) |
| spellingShingle | Jatinder Pal Singh Ajay Kumar Sao Babita Sharma Satyam Garg Anjali Sharma Reema Gupta Lokesh Rana Mallika Verma Akhilesh Pandey Archibald Theodore Nimal Upendra Mittal Amit Kumar Vishwakarma Monika Tomar Arijit Chowdhuri Advancements in lamb wave high-frequency devices using diamond-like carbon (DLC) coatings Chemical Physics Impact Lamb wave Surface acoustic wave Diamond like carbon Zinc oxide Hot filament chemical vapor deposition (HFCVD) |
| title | Advancements in lamb wave high-frequency devices using diamond-like carbon (DLC) coatings |
| title_full | Advancements in lamb wave high-frequency devices using diamond-like carbon (DLC) coatings |
| title_fullStr | Advancements in lamb wave high-frequency devices using diamond-like carbon (DLC) coatings |
| title_full_unstemmed | Advancements in lamb wave high-frequency devices using diamond-like carbon (DLC) coatings |
| title_short | Advancements in lamb wave high-frequency devices using diamond-like carbon (DLC) coatings |
| title_sort | advancements in lamb wave high frequency devices using diamond like carbon dlc coatings |
| topic | Lamb wave Surface acoustic wave Diamond like carbon Zinc oxide Hot filament chemical vapor deposition (HFCVD) |
| url | http://www.sciencedirect.com/science/article/pii/S2667022425000210 |
| work_keys_str_mv | AT jatinderpalsingh advancementsinlambwavehighfrequencydevicesusingdiamondlikecarbondlccoatings AT ajaykumarsao advancementsinlambwavehighfrequencydevicesusingdiamondlikecarbondlccoatings AT babitasharma advancementsinlambwavehighfrequencydevicesusingdiamondlikecarbondlccoatings AT satyamgarg advancementsinlambwavehighfrequencydevicesusingdiamondlikecarbondlccoatings AT anjalisharma advancementsinlambwavehighfrequencydevicesusingdiamondlikecarbondlccoatings AT reemagupta advancementsinlambwavehighfrequencydevicesusingdiamondlikecarbondlccoatings AT lokeshrana advancementsinlambwavehighfrequencydevicesusingdiamondlikecarbondlccoatings AT mallikaverma advancementsinlambwavehighfrequencydevicesusingdiamondlikecarbondlccoatings AT akhileshpandey advancementsinlambwavehighfrequencydevicesusingdiamondlikecarbondlccoatings AT archibaldtheodorenimal advancementsinlambwavehighfrequencydevicesusingdiamondlikecarbondlccoatings AT upendramittal advancementsinlambwavehighfrequencydevicesusingdiamondlikecarbondlccoatings AT amitkumarvishwakarma advancementsinlambwavehighfrequencydevicesusingdiamondlikecarbondlccoatings AT monikatomar advancementsinlambwavehighfrequencydevicesusingdiamondlikecarbondlccoatings AT arijitchowdhuri advancementsinlambwavehighfrequencydevicesusingdiamondlikecarbondlccoatings |