System-level modeling with temperature compensation for a CMOS-MEMS monolithic calorimetric flow sensing SoC
Abstract We present a system-level model with an on-chip temperature compensation technique for a CMOS-MEMS monolithic calorimetric flow sensing SoC. The model encompasses mechanical, thermal, and electrical domains to facilitate the co-design of a MEMS sensor and CMOS interface circuits on the EDA...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
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Nature Publishing Group
2025-01-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-024-00853-8 |
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| _version_ | 1832585664995000320 |
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| author | Linze Hong Ke Xiao Xiangyu Song Liwei Lin Wei Xu |
| author_facet | Linze Hong Ke Xiao Xiangyu Song Liwei Lin Wei Xu |
| author_sort | Linze Hong |
| collection | DOAJ |
| description | Abstract We present a system-level model with an on-chip temperature compensation technique for a CMOS-MEMS monolithic calorimetric flow sensing SoC. The model encompasses mechanical, thermal, and electrical domains to facilitate the co-design of a MEMS sensor and CMOS interface circuits on the EDA platform. The compensation strategy is implemented on-chip with a variable temperature difference heating circuit. Results show that the linear programming for the low-temperature drift in the SoC output is characterized by a compensation resistor R c with a resistance value of 748.21 Ω and a temperature coefficient of resistance of 3.037 × 10−3 °C−1 at 25 °C. Experimental validation demonstrates that within an ambient temperature range of 0–50 °C and a flow range of 0–10 m/s, the temperature drift of the sensor is reduced to ±1.6%, as compared to ±8.9% observed in a counterpart with the constant temperature difference circuit. Therefore, this on-chip temperature-compensated CMOS-MEMS flow sensing SoC is promising for low-cost sensing applications such as respiratory monitoring and smart energy-efficient buildings. |
| format | Article |
| id | doaj-art-c12e3ee5fbca4bce825521e4eba6a2bc |
| institution | Kabale University |
| issn | 2055-7434 |
| language | English |
| publishDate | 2025-01-01 |
| publisher | Nature Publishing Group |
| record_format | Article |
| series | Microsystems & Nanoengineering |
| spelling | doaj-art-c12e3ee5fbca4bce825521e4eba6a2bc2025-01-26T12:38:23ZengNature Publishing GroupMicrosystems & Nanoengineering2055-74342025-01-0111111110.1038/s41378-024-00853-8System-level modeling with temperature compensation for a CMOS-MEMS monolithic calorimetric flow sensing SoCLinze Hong0Ke Xiao1Xiangyu Song2Liwei Lin3Wei Xu4State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen UniversityState Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen UniversityState Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen UniversityDepartment of Mechanical Engineering, University of CaliforniaState Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen UniversityAbstract We present a system-level model with an on-chip temperature compensation technique for a CMOS-MEMS monolithic calorimetric flow sensing SoC. The model encompasses mechanical, thermal, and electrical domains to facilitate the co-design of a MEMS sensor and CMOS interface circuits on the EDA platform. The compensation strategy is implemented on-chip with a variable temperature difference heating circuit. Results show that the linear programming for the low-temperature drift in the SoC output is characterized by a compensation resistor R c with a resistance value of 748.21 Ω and a temperature coefficient of resistance of 3.037 × 10−3 °C−1 at 25 °C. Experimental validation demonstrates that within an ambient temperature range of 0–50 °C and a flow range of 0–10 m/s, the temperature drift of the sensor is reduced to ±1.6%, as compared to ±8.9% observed in a counterpart with the constant temperature difference circuit. Therefore, this on-chip temperature-compensated CMOS-MEMS flow sensing SoC is promising for low-cost sensing applications such as respiratory monitoring and smart energy-efficient buildings.https://doi.org/10.1038/s41378-024-00853-8 |
| spellingShingle | Linze Hong Ke Xiao Xiangyu Song Liwei Lin Wei Xu System-level modeling with temperature compensation for a CMOS-MEMS monolithic calorimetric flow sensing SoC Microsystems & Nanoengineering |
| title | System-level modeling with temperature compensation for a CMOS-MEMS monolithic calorimetric flow sensing SoC |
| title_full | System-level modeling with temperature compensation for a CMOS-MEMS monolithic calorimetric flow sensing SoC |
| title_fullStr | System-level modeling with temperature compensation for a CMOS-MEMS monolithic calorimetric flow sensing SoC |
| title_full_unstemmed | System-level modeling with temperature compensation for a CMOS-MEMS monolithic calorimetric flow sensing SoC |
| title_short | System-level modeling with temperature compensation for a CMOS-MEMS monolithic calorimetric flow sensing SoC |
| title_sort | system level modeling with temperature compensation for a cmos mems monolithic calorimetric flow sensing soc |
| url | https://doi.org/10.1038/s41378-024-00853-8 |
| work_keys_str_mv | AT linzehong systemlevelmodelingwithtemperaturecompensationforacmosmemsmonolithiccalorimetricflowsensingsoc AT kexiao systemlevelmodelingwithtemperaturecompensationforacmosmemsmonolithiccalorimetricflowsensingsoc AT xiangyusong systemlevelmodelingwithtemperaturecompensationforacmosmemsmonolithiccalorimetricflowsensingsoc AT liweilin systemlevelmodelingwithtemperaturecompensationforacmosmemsmonolithiccalorimetricflowsensingsoc AT weixu systemlevelmodelingwithtemperaturecompensationforacmosmemsmonolithiccalorimetricflowsensingsoc |