Bifurcation Type Change of AC Electrostatically Actuated MEMS Resonators due to DC Bias
This paper investigates the nonlinear response of microelectromechanical system (MEMS) cantilever resonator electrostatically actuated by applying a soft alternating current (AC) voltage and an even softer direct current (DC) voltage between the resonators and a parallel fixed ground plate. The AC f...
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| Format: | Article |
| Language: | English |
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Wiley
2014-01-01
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| Series: | Shock and Vibration |
| Online Access: | http://dx.doi.org/10.1155/2014/542023 |
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| _version_ | 1832566636999081984 |
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| author | Dumitru I. Caruntu Kyle N. Taylor |
| author_facet | Dumitru I. Caruntu Kyle N. Taylor |
| author_sort | Dumitru I. Caruntu |
| collection | DOAJ |
| description | This paper investigates the nonlinear response of microelectromechanical system (MEMS) cantilever resonator electrostatically actuated by applying a soft alternating current (AC) voltage and an even softer direct current (DC) voltage between the resonators and a parallel fixed ground plate. The AC frequency is near natural frequency. This drives the resonator into nonlinear parametric resonance. The method of multiple scales (MMS) is used to solve the dimensionless differential equation of motion of the resonator and find the steady-state solutions. The reduced order model (ROM) method is used to validate the results obtained using MMS. The effect of the soft DC voltage (bias) component on the frequency response is reported. It is shown that the DC bias changes the subcritical Hopf bifurcation into a cyclic fold bifurcation and shifts the bifurcation point (where the system loses stability) to lower frequencies and larger amplitudes. |
| format | Article |
| id | doaj-art-bf8a6d875df5400295a157d74c938fcc |
| institution | Kabale University |
| issn | 1070-9622 1875-9203 |
| language | English |
| publishDate | 2014-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | Shock and Vibration |
| spelling | doaj-art-bf8a6d875df5400295a157d74c938fcc2025-02-03T01:03:42ZengWileyShock and Vibration1070-96221875-92032014-01-01201410.1155/2014/542023542023Bifurcation Type Change of AC Electrostatically Actuated MEMS Resonators due to DC BiasDumitru I. Caruntu0Kyle N. Taylor1Mechanical Engineering Department, University of Texas-Pan American, Edinburg, TX 78539, USAMechanical Engineering Department, University of Texas-Pan American, Edinburg, TX 78539, USAThis paper investigates the nonlinear response of microelectromechanical system (MEMS) cantilever resonator electrostatically actuated by applying a soft alternating current (AC) voltage and an even softer direct current (DC) voltage between the resonators and a parallel fixed ground plate. The AC frequency is near natural frequency. This drives the resonator into nonlinear parametric resonance. The method of multiple scales (MMS) is used to solve the dimensionless differential equation of motion of the resonator and find the steady-state solutions. The reduced order model (ROM) method is used to validate the results obtained using MMS. The effect of the soft DC voltage (bias) component on the frequency response is reported. It is shown that the DC bias changes the subcritical Hopf bifurcation into a cyclic fold bifurcation and shifts the bifurcation point (where the system loses stability) to lower frequencies and larger amplitudes.http://dx.doi.org/10.1155/2014/542023 |
| spellingShingle | Dumitru I. Caruntu Kyle N. Taylor Bifurcation Type Change of AC Electrostatically Actuated MEMS Resonators due to DC Bias Shock and Vibration |
| title | Bifurcation Type Change of AC Electrostatically Actuated MEMS Resonators due to DC Bias |
| title_full | Bifurcation Type Change of AC Electrostatically Actuated MEMS Resonators due to DC Bias |
| title_fullStr | Bifurcation Type Change of AC Electrostatically Actuated MEMS Resonators due to DC Bias |
| title_full_unstemmed | Bifurcation Type Change of AC Electrostatically Actuated MEMS Resonators due to DC Bias |
| title_short | Bifurcation Type Change of AC Electrostatically Actuated MEMS Resonators due to DC Bias |
| title_sort | bifurcation type change of ac electrostatically actuated mems resonators due to dc bias |
| url | http://dx.doi.org/10.1155/2014/542023 |
| work_keys_str_mv | AT dumitruicaruntu bifurcationtypechangeofacelectrostaticallyactuatedmemsresonatorsduetodcbias AT kylentaylor bifurcationtypechangeofacelectrostaticallyactuatedmemsresonatorsduetodcbias |