Purity of Ion Beams: Analysis and Simulation of Mass Spectra and Mass Interferences in Ion Implantation
This paper shows that charge exchange events and dissociation reactions of ions may impact the purity of the ion beam in ion implantation, leading to contamination of the implanted target. Physical relations are derived that explain why unwanted ions are transported in the ion beam despite of a magn...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
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Wiley
2012-01-01
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| Series: | Advances in Materials Science and Engineering |
| Online Access: | http://dx.doi.org/10.1155/2012/610150 |
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| _version_ | 1832565468809920512 |
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| author | Volker Häublein Heiner Ryssel Lothar Frey |
| author_facet | Volker Häublein Heiner Ryssel Lothar Frey |
| author_sort | Volker Häublein |
| collection | DOAJ |
| description | This paper shows that charge exchange events and dissociation reactions of ions may impact the purity of the ion beam in ion implantation, leading to contamination of the implanted target. Physical relations are derived that explain why unwanted ions are transported in the ion beam despite of a magnetic mass separation. Based on those relations, the simulation tool ENCOTION (ENergetic COntamination simulaTION) has been developed. ENCOTION is a very powerful tool for the simulation of transport mechanisms of ions through a magnet analyzer and for the simulation of mass spectra, as will be demonstrated in this paper. |
| format | Article |
| id | doaj-art-bba32e51505d417d97ed07166d5f77e4 |
| institution | Kabale University |
| issn | 1687-8434 1687-8442 |
| language | English |
| publishDate | 2012-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | Advances in Materials Science and Engineering |
| spelling | doaj-art-bba32e51505d417d97ed07166d5f77e42025-02-03T01:07:43ZengWileyAdvances in Materials Science and Engineering1687-84341687-84422012-01-01201210.1155/2012/610150610150Purity of Ion Beams: Analysis and Simulation of Mass Spectra and Mass Interferences in Ion ImplantationVolker Häublein0Heiner Ryssel1Lothar Frey2Fraunhofer Institut für Integrierte Systeme und Bauelementetechnologie, Schottkystrasse 10, 91058 Erlangen, GermanyFraunhofer Institut für Integrierte Systeme und Bauelementetechnologie, Schottkystrasse 10, 91058 Erlangen, GermanyFraunhofer Institut für Integrierte Systeme und Bauelementetechnologie, Schottkystrasse 10, 91058 Erlangen, GermanyThis paper shows that charge exchange events and dissociation reactions of ions may impact the purity of the ion beam in ion implantation, leading to contamination of the implanted target. Physical relations are derived that explain why unwanted ions are transported in the ion beam despite of a magnetic mass separation. Based on those relations, the simulation tool ENCOTION (ENergetic COntamination simulaTION) has been developed. ENCOTION is a very powerful tool for the simulation of transport mechanisms of ions through a magnet analyzer and for the simulation of mass spectra, as will be demonstrated in this paper.http://dx.doi.org/10.1155/2012/610150 |
| spellingShingle | Volker Häublein Heiner Ryssel Lothar Frey Purity of Ion Beams: Analysis and Simulation of Mass Spectra and Mass Interferences in Ion Implantation Advances in Materials Science and Engineering |
| title | Purity of Ion Beams: Analysis and Simulation of Mass Spectra and Mass Interferences in Ion Implantation |
| title_full | Purity of Ion Beams: Analysis and Simulation of Mass Spectra and Mass Interferences in Ion Implantation |
| title_fullStr | Purity of Ion Beams: Analysis and Simulation of Mass Spectra and Mass Interferences in Ion Implantation |
| title_full_unstemmed | Purity of Ion Beams: Analysis and Simulation of Mass Spectra and Mass Interferences in Ion Implantation |
| title_short | Purity of Ion Beams: Analysis and Simulation of Mass Spectra and Mass Interferences in Ion Implantation |
| title_sort | purity of ion beams analysis and simulation of mass spectra and mass interferences in ion implantation |
| url | http://dx.doi.org/10.1155/2012/610150 |
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