Fully Vertical GaN-on-SiC p-i-n Diodes With BFOM of 2.89 GW/cm<sup>2</sup>

This letter reports a high-performance fully-vertical GaN-on-SiC p-i-n diode enabled by a conductive n-AlGaN buffer. The buffer conductivity was optimized by tuning the Al composition. The diode presents an ultra-low specific ON-resistance of 0.25 <inline-formula> <tex-math notation="L...

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Main Authors: Jialun Li, Renqiang Zhu, Ka Ming Wong, Kei May Lau
Format: Article
Language:English
Published: IEEE 2024-01-01
Series:IEEE Journal of the Electron Devices Society
Subjects:
Online Access:https://ieeexplore.ieee.org/document/10496446/
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author Jialun Li
Renqiang Zhu
Ka Ming Wong
Kei May Lau
author_facet Jialun Li
Renqiang Zhu
Ka Ming Wong
Kei May Lau
author_sort Jialun Li
collection DOAJ
description This letter reports a high-performance fully-vertical GaN-on-SiC p-i-n diode enabled by a conductive n-AlGaN buffer. The buffer conductivity was optimized by tuning the Al composition. The diode presents an ultra-low specific ON-resistance of 0.25 <inline-formula> <tex-math notation="LaTeX">$\text{m}\Omega \cdot $ </tex-math></inline-formula>cm2, a high current swing of 1011, and a high breakdown voltage of 850 V with a 5-<inline-formula> <tex-math notation="LaTeX">$\mu \text{m}$ </tex-math></inline-formula>-thick drift layer, leading to a Baliga&#x2019;s figure of merit (BFOM) of 2.89 GW/cm2. The diode performance at elevated temperatures and the OFF-state leakage mechanism are analyzed. The demonstrated fully-vertical GaN-on-SiC p-i-n diode with a conductive buffer reveals a simple way towards realizing high-performance fully-vertical GaN-on-SiC devices for high power applications.
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institution Kabale University
issn 2168-6734
language English
publishDate 2024-01-01
publisher IEEE
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series IEEE Journal of the Electron Devices Society
spelling doaj-art-ba973af1a55f4af3988a3ac38c75d29c2025-01-29T00:00:06ZengIEEEIEEE Journal of the Electron Devices Society2168-67342024-01-011231832110.1109/JEDS.2024.338685710496446Fully Vertical GaN-on-SiC p-i-n Diodes With BFOM of 2.89 GW/cm<sup>2</sup>Jialun Li0https://orcid.org/0000-0002-9709-9240Renqiang Zhu1https://orcid.org/0000-0002-2456-2855Ka Ming Wong2https://orcid.org/0000-0003-3770-1380Kei May Lau3https://orcid.org/0000-0002-7713-1928Department of Electronic and Computer Engineering, Hong Kong University of Science and Technology, Sai Kung, Hong KongDepartment of Electronic and Computer Engineering, Hong Kong University of Science and Technology, Sai Kung, Hong KongDepartment of Electronic and Computer Engineering, Hong Kong University of Science and Technology, Sai Kung, Hong KongDivision of Emerging Interdisciplinary Area, Hong Kong University of Science and Technology, Sai Kung, Hong KongThis letter reports a high-performance fully-vertical GaN-on-SiC p-i-n diode enabled by a conductive n-AlGaN buffer. The buffer conductivity was optimized by tuning the Al composition. The diode presents an ultra-low specific ON-resistance of 0.25 <inline-formula> <tex-math notation="LaTeX">$\text{m}\Omega \cdot $ </tex-math></inline-formula>cm2, a high current swing of 1011, and a high breakdown voltage of 850 V with a 5-<inline-formula> <tex-math notation="LaTeX">$\mu \text{m}$ </tex-math></inline-formula>-thick drift layer, leading to a Baliga&#x2019;s figure of merit (BFOM) of 2.89 GW/cm2. The diode performance at elevated temperatures and the OFF-state leakage mechanism are analyzed. The demonstrated fully-vertical GaN-on-SiC p-i-n diode with a conductive buffer reveals a simple way towards realizing high-performance fully-vertical GaN-on-SiC devices for high power applications.https://ieeexplore.ieee.org/document/10496446/Gallium nitridefully-verticalGaN-on-SiCconductive bufferp-i-n diode
spellingShingle Jialun Li
Renqiang Zhu
Ka Ming Wong
Kei May Lau
Fully Vertical GaN-on-SiC p-i-n Diodes With BFOM of 2.89 GW/cm<sup>2</sup>
IEEE Journal of the Electron Devices Society
Gallium nitride
fully-vertical
GaN-on-SiC
conductive buffer
p-i-n diode
title Fully Vertical GaN-on-SiC p-i-n Diodes With BFOM of 2.89 GW/cm<sup>2</sup>
title_full Fully Vertical GaN-on-SiC p-i-n Diodes With BFOM of 2.89 GW/cm<sup>2</sup>
title_fullStr Fully Vertical GaN-on-SiC p-i-n Diodes With BFOM of 2.89 GW/cm<sup>2</sup>
title_full_unstemmed Fully Vertical GaN-on-SiC p-i-n Diodes With BFOM of 2.89 GW/cm<sup>2</sup>
title_short Fully Vertical GaN-on-SiC p-i-n Diodes With BFOM of 2.89 GW/cm<sup>2</sup>
title_sort fully vertical gan on sic p i n diodes with bfom of 2 89 gw cm sup 2 sup
topic Gallium nitride
fully-vertical
GaN-on-SiC
conductive buffer
p-i-n diode
url https://ieeexplore.ieee.org/document/10496446/
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AT renqiangzhu fullyverticalganonsicpindiodeswithbfomof289gwcmsup2sup
AT kamingwong fullyverticalganonsicpindiodeswithbfomof289gwcmsup2sup
AT keimaylau fullyverticalganonsicpindiodeswithbfomof289gwcmsup2sup