Comparative Simulation Analysis of Process Parameter Variations in 20 nm Triangular FinFET

Technology scaling below 22 nm has brought several detrimental effects such as increased short channel effects (SCEs) and leakage currents. In deep submicron technology further scaling in gate length and oxide thickness can be achieved by changing the device structure of MOSFET. For 10–30 nm channel...

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Bibliographic Details
Main Authors: Satyam Shukla, Sandeep Singh Gill, Navneet Kaur, H. S. Jatana, Varun Nehru
Format: Article
Language:English
Published: Wiley 2017-01-01
Series:Active and Passive Electronic Components
Online Access:http://dx.doi.org/10.1155/2017/5947819
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