Development of Removable Hollow Cathode Discharge Apparatus for Sputtering Solid Metals
A hollow cathode discharge cell has been developed for a variety of sample phases. To make the experimental apparatus compact, we have adopted DC discharge, and the discharge cell was inexpensively constructed for replacement with commercially available vacuum parts. The most distinctive attribute o...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2019-01-01
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| Series: | Journal of Spectroscopy |
| Online Access: | http://dx.doi.org/10.1155/2019/7491671 |
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