Development of Removable Hollow Cathode Discharge Apparatus for Sputtering Solid Metals
A hollow cathode discharge cell has been developed for a variety of sample phases. To make the experimental apparatus compact, we have adopted DC discharge, and the discharge cell was inexpensively constructed for replacement with commercially available vacuum parts. The most distinctive attribute o...
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| Format: | Article |
| Language: | English |
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Wiley
2019-01-01
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| Series: | Journal of Spectroscopy |
| Online Access: | http://dx.doi.org/10.1155/2019/7491671 |
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| _version_ | 1832561037240434688 |
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| author | Daisuke Ishikawa Shuichi Hasegawa |
| author_facet | Daisuke Ishikawa Shuichi Hasegawa |
| author_sort | Daisuke Ishikawa |
| collection | DOAJ |
| description | A hollow cathode discharge cell has been developed for a variety of sample phases. To make the experimental apparatus compact, we have adopted DC discharge, and the discharge cell was inexpensively constructed for replacement with commercially available vacuum parts. The most distinctive attribute of the developed cell is the double structure of the cathodes. The occurrence of sputtering resulted in the metal atom in gas phase. With Ar buffer gas, the favorable condition of laser absorption spectroscopy for the gas phase sample was investigated. |
| format | Article |
| id | doaj-art-b4adb7d5004f4c4d86a1c98382dbb136 |
| institution | Kabale University |
| issn | 2314-4920 2314-4939 |
| language | English |
| publishDate | 2019-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | Journal of Spectroscopy |
| spelling | doaj-art-b4adb7d5004f4c4d86a1c98382dbb1362025-02-03T01:26:10ZengWileyJournal of Spectroscopy2314-49202314-49392019-01-01201910.1155/2019/74916717491671Development of Removable Hollow Cathode Discharge Apparatus for Sputtering Solid MetalsDaisuke Ishikawa0Shuichi Hasegawa1Department of Nuclear Engineering and Management, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-0033, JapanDepartment of Nuclear Engineering and Management, University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113-0033, JapanA hollow cathode discharge cell has been developed for a variety of sample phases. To make the experimental apparatus compact, we have adopted DC discharge, and the discharge cell was inexpensively constructed for replacement with commercially available vacuum parts. The most distinctive attribute of the developed cell is the double structure of the cathodes. The occurrence of sputtering resulted in the metal atom in gas phase. With Ar buffer gas, the favorable condition of laser absorption spectroscopy for the gas phase sample was investigated.http://dx.doi.org/10.1155/2019/7491671 |
| spellingShingle | Daisuke Ishikawa Shuichi Hasegawa Development of Removable Hollow Cathode Discharge Apparatus for Sputtering Solid Metals Journal of Spectroscopy |
| title | Development of Removable Hollow Cathode Discharge Apparatus for Sputtering Solid Metals |
| title_full | Development of Removable Hollow Cathode Discharge Apparatus for Sputtering Solid Metals |
| title_fullStr | Development of Removable Hollow Cathode Discharge Apparatus for Sputtering Solid Metals |
| title_full_unstemmed | Development of Removable Hollow Cathode Discharge Apparatus for Sputtering Solid Metals |
| title_short | Development of Removable Hollow Cathode Discharge Apparatus for Sputtering Solid Metals |
| title_sort | development of removable hollow cathode discharge apparatus for sputtering solid metals |
| url | http://dx.doi.org/10.1155/2019/7491671 |
| work_keys_str_mv | AT daisukeishikawa developmentofremovablehollowcathodedischargeapparatusforsputteringsolidmetals AT shuichihasegawa developmentofremovablehollowcathodedischargeapparatusforsputteringsolidmetals |