Repetition Frequency-Dependent Formation of Oxidized LIPSSs on Amorphous Silicon Films
Laser-induced periodic surface structures (LIPSSs) produced via ultrafast laser-induced oxidation offer a promising route for high-quality nanostructuring, with reduced thermal damage compared to conventional ablation-based methods. However, the influence of laser repetition frequency on the formati...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-07-01
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| Series: | Photonics |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2304-6732/12/7/667 |
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