A Micromechanical Wide-Range Stiffness-Tuning Mechanism for MEMS Optical Switches
MEMS stiffness-tunable devices, owing to their low resonant frequency and high sensitivity, have been widely adopted in fields such as biological force sensing, vibration sensing, and inertial sensing. However, traditional stress-effect-based stiffness-adjustment methods offer limited tuning range....
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-03-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/16/4/397 |
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