Crystalline Silicon PERC Solar Cell with Ozonized AlOx Passivation Layer on the Rear Side

We present a method of ozonation to form the rear-side passivation layers of crystalline silicon PERC cells. In the method, a thin aluminum film was deposited on the back surface of a silicon wafer and then was oxidized into an aluminum oxide layer by gaseous ozone. Lifetimes of the wafers with such...

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Main Authors: Pang-Kai Liu, Yu-Lun Cheng, Likarn Wang
Format: Article
Language:English
Published: Wiley 2020-01-01
Series:International Journal of Photoenergy
Online Access:http://dx.doi.org/10.1155/2020/6686797
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author Pang-Kai Liu
Yu-Lun Cheng
Likarn Wang
author_facet Pang-Kai Liu
Yu-Lun Cheng
Likarn Wang
author_sort Pang-Kai Liu
collection DOAJ
description We present a method of ozonation to form the rear-side passivation layers of crystalline silicon PERC cells. In the method, a thin aluminum film was deposited on the back surface of a silicon wafer and then was oxidized into an aluminum oxide layer by gaseous ozone. Lifetimes of the wafers with such passivation layers proved to be increased with respect to those untreated, and the resultant PERC cells showed a performance improvement compared with standard cells with full back surface fields.
format Article
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institution Kabale University
issn 1110-662X
1687-529X
language English
publishDate 2020-01-01
publisher Wiley
record_format Article
series International Journal of Photoenergy
spelling doaj-art-ae0cd33d87154fe894f399d8ce3d38cc2025-02-03T06:00:49ZengWileyInternational Journal of Photoenergy1110-662X1687-529X2020-01-01202010.1155/2020/66867976686797Crystalline Silicon PERC Solar Cell with Ozonized AlOx Passivation Layer on the Rear SidePang-Kai Liu0Yu-Lun Cheng1Likarn Wang2Institute of Photonics Technologies, National Tsing Hua University, Hsinchu, TaiwanInstitute of Photonics Technologies, National Tsing Hua University, Hsinchu, TaiwanInstitute of Photonics Technologies, National Tsing Hua University, Hsinchu, TaiwanWe present a method of ozonation to form the rear-side passivation layers of crystalline silicon PERC cells. In the method, a thin aluminum film was deposited on the back surface of a silicon wafer and then was oxidized into an aluminum oxide layer by gaseous ozone. Lifetimes of the wafers with such passivation layers proved to be increased with respect to those untreated, and the resultant PERC cells showed a performance improvement compared with standard cells with full back surface fields.http://dx.doi.org/10.1155/2020/6686797
spellingShingle Pang-Kai Liu
Yu-Lun Cheng
Likarn Wang
Crystalline Silicon PERC Solar Cell with Ozonized AlOx Passivation Layer on the Rear Side
International Journal of Photoenergy
title Crystalline Silicon PERC Solar Cell with Ozonized AlOx Passivation Layer on the Rear Side
title_full Crystalline Silicon PERC Solar Cell with Ozonized AlOx Passivation Layer on the Rear Side
title_fullStr Crystalline Silicon PERC Solar Cell with Ozonized AlOx Passivation Layer on the Rear Side
title_full_unstemmed Crystalline Silicon PERC Solar Cell with Ozonized AlOx Passivation Layer on the Rear Side
title_short Crystalline Silicon PERC Solar Cell with Ozonized AlOx Passivation Layer on the Rear Side
title_sort crystalline silicon perc solar cell with ozonized alox passivation layer on the rear side
url http://dx.doi.org/10.1155/2020/6686797
work_keys_str_mv AT pangkailiu crystallinesiliconpercsolarcellwithozonizedaloxpassivationlayerontherearside
AT yuluncheng crystallinesiliconpercsolarcellwithozonizedaloxpassivationlayerontherearside
AT likarnwang crystallinesiliconpercsolarcellwithozonizedaloxpassivationlayerontherearside