Laser Writing of GaN/Ga2O3 Heterojunction Photodetector Arrays

Abstract Photodetectors play a crucial role in converting light signals into electrical signals and have significant applications in various fields such as communications, imaging, and sensing. However, the fabrication of a photodetector is a complex process that involves precise control of surface...

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Main Authors: Pengxiang Sun, Xun Yang, Kexue Li, Zhipeng Wei, Wei Fan, Shaoyi Wang, Weimin Zhou, Chongxin Shan
Format: Article
Language:English
Published: Wiley-VCH 2025-01-01
Series:Advanced Materials Interfaces
Subjects:
Online Access:https://doi.org/10.1002/admi.202300371
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author Pengxiang Sun
Xun Yang
Kexue Li
Zhipeng Wei
Wei Fan
Shaoyi Wang
Weimin Zhou
Chongxin Shan
author_facet Pengxiang Sun
Xun Yang
Kexue Li
Zhipeng Wei
Wei Fan
Shaoyi Wang
Weimin Zhou
Chongxin Shan
author_sort Pengxiang Sun
collection DOAJ
description Abstract Photodetectors play a crucial role in converting light signals into electrical signals and have significant applications in various fields such as communications, imaging, and sensing. However, the fabrication of a photodetector is a complex process that involves precise control of surface preparation, lithography, and deposition techniques. Here the study demonstrates that GaN/Ga2O3 heterojunctions can be fabricated utilizing laser processing to transform the surface of GaN into Ga2O3. The GaN/Ga2O3 heterojunctions exhibit good reproducibility, uniformity, and ability to operate under zero bias, with a responsivity of 110.22 mA W−1, a detection rate of 5.56 × 1011 jones, and an external quantum efficiency of 42.34%. Moreover, an 8 × 8 photodetector array based on GaN/Ga2O3 heterojunction is fabricated via laser writing and is demonstrated to have ultraviolet imaging capabilities. This report presents the pioneering fabrication of a photodetector array using laser writing. The findings offer a versatile and scalable approach for the production of large‐area heterojunction photodetector arrays.
format Article
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institution Kabale University
issn 2196-7350
language English
publishDate 2025-01-01
publisher Wiley-VCH
record_format Article
series Advanced Materials Interfaces
spelling doaj-art-ac54bdeca217479e8a01368a15613ffe2025-01-20T13:56:18ZengWiley-VCHAdvanced Materials Interfaces2196-73502025-01-01122n/an/a10.1002/admi.202300371Laser Writing of GaN/Ga2O3 Heterojunction Photodetector ArraysPengxiang Sun0Xun Yang1Kexue Li2Zhipeng Wei3Wei Fan4Shaoyi Wang5Weimin Zhou6Chongxin Shan7Henan Key Laboratory of Diamond Optoelectronic Materials and Devices Key Laboratory of Materials Physics Ministry of Education School of Physics and Microelectronics Zhengzhou University Zhengzhou 450052 ChinaHenan Key Laboratory of Diamond Optoelectronic Materials and Devices Key Laboratory of Materials Physics Ministry of Education School of Physics and Microelectronics Zhengzhou University Zhengzhou 450052 ChinaState Key Laboratory of High Power Semiconductor Lasers Changchun University of Science and Technology Changchun 130022 ChinaState Key Laboratory of High Power Semiconductor Lasers Changchun University of Science and Technology Changchun 130022 ChinaScience and Technology on Plasma Physics Laboratory Laser Fusion Research Center China Academy of Engineering Physics Mianyang 621900 ChinaScience and Technology on Plasma Physics Laboratory Laser Fusion Research Center China Academy of Engineering Physics Mianyang 621900 ChinaScience and Technology on Plasma Physics Laboratory Laser Fusion Research Center China Academy of Engineering Physics Mianyang 621900 ChinaHenan Key Laboratory of Diamond Optoelectronic Materials and Devices Key Laboratory of Materials Physics Ministry of Education School of Physics and Microelectronics Zhengzhou University Zhengzhou 450052 ChinaAbstract Photodetectors play a crucial role in converting light signals into electrical signals and have significant applications in various fields such as communications, imaging, and sensing. However, the fabrication of a photodetector is a complex process that involves precise control of surface preparation, lithography, and deposition techniques. Here the study demonstrates that GaN/Ga2O3 heterojunctions can be fabricated utilizing laser processing to transform the surface of GaN into Ga2O3. The GaN/Ga2O3 heterojunctions exhibit good reproducibility, uniformity, and ability to operate under zero bias, with a responsivity of 110.22 mA W−1, a detection rate of 5.56 × 1011 jones, and an external quantum efficiency of 42.34%. Moreover, an 8 × 8 photodetector array based on GaN/Ga2O3 heterojunction is fabricated via laser writing and is demonstrated to have ultraviolet imaging capabilities. This report presents the pioneering fabrication of a photodetector array using laser writing. The findings offer a versatile and scalable approach for the production of large‐area heterojunction photodetector arrays.https://doi.org/10.1002/admi.202300371Ga2O3GaNheterojunctionlaser writingultraviolet detection
spellingShingle Pengxiang Sun
Xun Yang
Kexue Li
Zhipeng Wei
Wei Fan
Shaoyi Wang
Weimin Zhou
Chongxin Shan
Laser Writing of GaN/Ga2O3 Heterojunction Photodetector Arrays
Advanced Materials Interfaces
Ga2O3
GaN
heterojunction
laser writing
ultraviolet detection
title Laser Writing of GaN/Ga2O3 Heterojunction Photodetector Arrays
title_full Laser Writing of GaN/Ga2O3 Heterojunction Photodetector Arrays
title_fullStr Laser Writing of GaN/Ga2O3 Heterojunction Photodetector Arrays
title_full_unstemmed Laser Writing of GaN/Ga2O3 Heterojunction Photodetector Arrays
title_short Laser Writing of GaN/Ga2O3 Heterojunction Photodetector Arrays
title_sort laser writing of gan ga2o3 heterojunction photodetector arrays
topic Ga2O3
GaN
heterojunction
laser writing
ultraviolet detection
url https://doi.org/10.1002/admi.202300371
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AT zhipengwei laserwritingofganga2o3heterojunctionphotodetectorarrays
AT weifan laserwritingofganga2o3heterojunctionphotodetectorarrays
AT shaoyiwang laserwritingofganga2o3heterojunctionphotodetectorarrays
AT weiminzhou laserwritingofganga2o3heterojunctionphotodetectorarrays
AT chongxinshan laserwritingofganga2o3heterojunctionphotodetectorarrays