Understanding the Preferred Crystal Orientation of Sputtered Silver in Ar/N2 Atmosphere: A Microstructure Investigation
Silver thin films were prepared by direct current (DC) magnetron sputtering technique in Ar/N2 atmosphere with various N2 volumetric ratios on Si substrates. Silver thin films prepared in pure Ar atmosphere show highly (111) preferred orientation. However, as the N2 content increases, Ag (111) prefe...
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| Format: | Article |
| Language: | English |
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Wiley
2019-01-01
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| Series: | Advances in Materials Science and Engineering |
| Online Access: | http://dx.doi.org/10.1155/2019/3079393 |
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| author | YuHao Hu Jiajun Zhu Chao Zhang Wulin Yang Licai Fu Deyi Li Lingping Zhou |
| author_facet | YuHao Hu Jiajun Zhu Chao Zhang Wulin Yang Licai Fu Deyi Li Lingping Zhou |
| author_sort | YuHao Hu |
| collection | DOAJ |
| description | Silver thin films were prepared by direct current (DC) magnetron sputtering technique in Ar/N2 atmosphere with various N2 volumetric ratios on Si substrates. Silver thin films prepared in pure Ar atmosphere show highly (111) preferred orientation. However, as the N2 content increases, Ag (111) preferred orientation evolves into (100) preferred orientation gradually. When N2 content is more than 12.5 vol.%, silver thin films exhibit highly (100) preferred orientation. Moreover, the average grain size decreases with increasing N2 content. Silver thin films with low relative density are prepared at high N2 content, which results in higher resistivity of films. By analyzing the resistivity and microstructures of silver thin films, the optimum range of N2 content to get compact silver thin films is found to be not more than 33.3 vol.%. Finally, the mechanism of N2 addition on microstructure evolution of silver thin films was proposed. |
| format | Article |
| id | doaj-art-a72f2adc62504bc3bd7725000b13c322 |
| institution | Kabale University |
| issn | 1687-8434 1687-8442 |
| language | English |
| publishDate | 2019-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | Advances in Materials Science and Engineering |
| spelling | doaj-art-a72f2adc62504bc3bd7725000b13c3222025-02-03T05:48:05ZengWileyAdvances in Materials Science and Engineering1687-84341687-84422019-01-01201910.1155/2019/30793933079393Understanding the Preferred Crystal Orientation of Sputtered Silver in Ar/N2 Atmosphere: A Microstructure InvestigationYuHao Hu0Jiajun Zhu1Chao Zhang2Wulin Yang3Licai Fu4Deyi Li5Lingping Zhou6College of Materials Science and Engineering, Hunan University, Changsha 410082, ChinaCollege of Materials Science and Engineering, Hunan University, Changsha 410082, ChinaScience and Technology on Power Sources Laboratory, Tianjin Institute of Power Sources, Tianjin 300384, ChinaCollege of Materials Science and Engineering, Hunan University, Changsha 410082, ChinaCollege of Materials Science and Engineering, Hunan University, Changsha 410082, ChinaCollege of Materials Science and Engineering, Hunan University, Changsha 410082, ChinaCollege of Materials Science and Engineering, Hunan University, Changsha 410082, ChinaSilver thin films were prepared by direct current (DC) magnetron sputtering technique in Ar/N2 atmosphere with various N2 volumetric ratios on Si substrates. Silver thin films prepared in pure Ar atmosphere show highly (111) preferred orientation. However, as the N2 content increases, Ag (111) preferred orientation evolves into (100) preferred orientation gradually. When N2 content is more than 12.5 vol.%, silver thin films exhibit highly (100) preferred orientation. Moreover, the average grain size decreases with increasing N2 content. Silver thin films with low relative density are prepared at high N2 content, which results in higher resistivity of films. By analyzing the resistivity and microstructures of silver thin films, the optimum range of N2 content to get compact silver thin films is found to be not more than 33.3 vol.%. Finally, the mechanism of N2 addition on microstructure evolution of silver thin films was proposed.http://dx.doi.org/10.1155/2019/3079393 |
| spellingShingle | YuHao Hu Jiajun Zhu Chao Zhang Wulin Yang Licai Fu Deyi Li Lingping Zhou Understanding the Preferred Crystal Orientation of Sputtered Silver in Ar/N2 Atmosphere: A Microstructure Investigation Advances in Materials Science and Engineering |
| title | Understanding the Preferred Crystal Orientation of Sputtered Silver in Ar/N2 Atmosphere: A Microstructure Investigation |
| title_full | Understanding the Preferred Crystal Orientation of Sputtered Silver in Ar/N2 Atmosphere: A Microstructure Investigation |
| title_fullStr | Understanding the Preferred Crystal Orientation of Sputtered Silver in Ar/N2 Atmosphere: A Microstructure Investigation |
| title_full_unstemmed | Understanding the Preferred Crystal Orientation of Sputtered Silver in Ar/N2 Atmosphere: A Microstructure Investigation |
| title_short | Understanding the Preferred Crystal Orientation of Sputtered Silver in Ar/N2 Atmosphere: A Microstructure Investigation |
| title_sort | understanding the preferred crystal orientation of sputtered silver in ar n2 atmosphere a microstructure investigation |
| url | http://dx.doi.org/10.1155/2019/3079393 |
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