The Effect of Residual Stress on the Electromechanical Behavior of Electrostatic Microactuators
This work simulates the nonlinear electromechanical behavior of different electrostatic microactuators. It applies the differential quadrature method, Hamilton's principle, and Wilson-θ integration method to derive the equations of motion of electrostatic microactuators and find a solution to t...
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2008-01-01
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| Series: | Active and Passive Electronic Components |
| Online Access: | http://dx.doi.org/10.1155/2008/905628 |
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| _version_ | 1832553415851376640 |
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| author | Ming-Hung Hsu |
| author_facet | Ming-Hung Hsu |
| author_sort | Ming-Hung Hsu |
| collection | DOAJ |
| description | This work simulates the nonlinear electromechanical behavior of different electrostatic microactuators. It applies the differential quadrature method, Hamilton's principle, and Wilson-θ integration method to derive the equations of motion of electrostatic microactuators and find a solution to these equations. Nonlinear equation difficulties are overcome by using the differential quadrature method. The stresses of electrostatic actuators are determined, and the residual stress effects of electrostatic microactuators are simulated. |
| format | Article |
| id | doaj-art-a5fec039c8544076b41deedf2c2758ba |
| institution | Kabale University |
| issn | 0882-7516 1563-5031 |
| language | English |
| publishDate | 2008-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | Active and Passive Electronic Components |
| spelling | doaj-art-a5fec039c8544076b41deedf2c2758ba2025-02-03T05:54:09ZengWileyActive and Passive Electronic Components0882-75161563-50312008-01-01200810.1155/2008/905628905628The Effect of Residual Stress on the Electromechanical Behavior of Electrostatic MicroactuatorsMing-Hung Hsu0Department of Electrical Engineering, National Penghu University, Penghu 880, TaiwanThis work simulates the nonlinear electromechanical behavior of different electrostatic microactuators. It applies the differential quadrature method, Hamilton's principle, and Wilson-θ integration method to derive the equations of motion of electrostatic microactuators and find a solution to these equations. Nonlinear equation difficulties are overcome by using the differential quadrature method. The stresses of electrostatic actuators are determined, and the residual stress effects of electrostatic microactuators are simulated.http://dx.doi.org/10.1155/2008/905628 |
| spellingShingle | Ming-Hung Hsu The Effect of Residual Stress on the Electromechanical Behavior of Electrostatic Microactuators Active and Passive Electronic Components |
| title | The Effect of Residual Stress on the Electromechanical Behavior of Electrostatic Microactuators |
| title_full | The Effect of Residual Stress on the Electromechanical Behavior of Electrostatic Microactuators |
| title_fullStr | The Effect of Residual Stress on the Electromechanical Behavior of Electrostatic Microactuators |
| title_full_unstemmed | The Effect of Residual Stress on the Electromechanical Behavior of Electrostatic Microactuators |
| title_short | The Effect of Residual Stress on the Electromechanical Behavior of Electrostatic Microactuators |
| title_sort | effect of residual stress on the electromechanical behavior of electrostatic microactuators |
| url | http://dx.doi.org/10.1155/2008/905628 |
| work_keys_str_mv | AT minghunghsu theeffectofresidualstressontheelectromechanicalbehaviorofelectrostaticmicroactuators AT minghunghsu effectofresidualstressontheelectromechanicalbehaviorofelectrostaticmicroactuators |