Characterization of ion track-etched conical nanopores in thermal and PECVD SiO2 using small angle X-ray scattering
Conical nanopores in amorphous SiO2 thin films fabricated using the ion track etching technique show promising potential for filtration, sensing, and nanofluidic applications. The characterization of the pore morphology and size distribution, along with its dependence on the material properties and...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Beilstein-Institut
2025-06-01
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| Series: | Beilstein Journal of Nanotechnology |
| Subjects: | |
| Online Access: | https://doi.org/10.3762/bjnano.16.68 |
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