Aerosol Deposited Polycrystalline PbZr<sub>0.53</sub>Ti<sub>0.47</sub>O<sub>3</sub> Thick Films with a Large Transverse Piezoelectric Coefficient
The aerosol deposition (AD) method utilizes high kinetic-energy submicron powders to impact and form a film on a substrate. It is a highly efficient deposition method, capable of producing films or coatings with a strong interfacial bonding and a dense nano-grain structure without thermal assistance...
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| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-02-01
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| Series: | Crystals |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2073-4352/15/2/159 |
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| Summary: | The aerosol deposition (AD) method utilizes high kinetic-energy submicron powders to impact and form a film on a substrate. It is a highly efficient deposition method, capable of producing films or coatings with a strong interfacial bonding and a dense nano-grain structure without thermal assistance. In this work, PbZr<sub>0.53</sub>Ti<sub>0.47</sub>O<sub>3</sub> (PZT53/47) films (~1.2 μm thick) were deposited on Pt/Ti/Si(100) substrates via the AD method. After a conventional annealing process (700 °C for 1 h), these PZT53/47 films displayed a dense, crack-free, nano-grained morphology, corresponding to an optimal electrical performance. A large maximum polarization (<i>P</i><sub>max</sub> = 70 μC/cm<sup>2</sup>) and a small coercive field (<i>E</i><sub>c</sub> = 104 kV/cm) were achieved under the maximum applicable electric field of 1.6 MV/cm. The PZT53/47 films also exhibited a large small-field dielectric constant of ~984, a high tunability of 72%, and a low leakage current of ~3.1 × 10<sup>−5</sup> A/cm<sup>2</sup> @ 40 V. Moreover, the transverse piezoelectric coefficient (<i>e</i><sub>31.f</sub>) of these AD-processed films was as high as −4.6 C/m<sup>2</sup>, comparable to those of sputter-deposited PZT53/47 films. These high-quality PZT53/47 thick films have broad applications in piezoelectric micro-electromechanical systems. |
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| ISSN: | 2073-4352 |