Influence of the Substrate Temperature on the Size Distribution and Phase Composition of Ablated HfO2 Nanoparticles

The influence of the substrate temperature on the formation of high-temperature phases of hafnium dioxide in the process of pulsed laser ablation is investigated. It is established that the HfO2 nanoparticles of the high-temperature tetragonal and cubic phases with a quantitative content up to 50 %...

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Main Authors: V.I. Panfilov, M.A. Pugachevskii, A.P. Kuzmenko, M.B. Dobromyslov
Format: Article
Language:English
Published: Sumy State University 2015-12-01
Series:Журнал нано- та електронної фізики
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Online Access:http://jnep.sumdu.edu.ua/download/numbers/2015/4/articles/jnep_2015_V7_04099.pdf
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author V.I. Panfilov
M.A. Pugachevskii
A.P. Kuzmenko
M.B. Dobromyslov
author_facet V.I. Panfilov
M.A. Pugachevskii
A.P. Kuzmenko
M.B. Dobromyslov
author_sort V.I. Panfilov
collection DOAJ
description The influence of the substrate temperature on the formation of high-temperature phases of hafnium dioxide in the process of pulsed laser ablation is investigated. It is established that the HfO2 nanoparticles of the high-temperature tetragonal and cubic phases with a quantitative content up to 50 % are formed on the surface of the substrate at room temperature during the laser ablation with intensity of 1010 W/m2. It is shown that with increasing the substrate temperature the average size of the ablated nanoparticles decreases and the quantitative content of the high-temperature phases is increased up to 70 %.
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institution DOAJ
issn 2077-6772
language English
publishDate 2015-12-01
publisher Sumy State University
record_format Article
series Журнал нано- та електронної фізики
spelling doaj-art-a52606900a3d457aa9fa3a4f7bea5cf02025-08-20T03:19:00ZengSumy State UniversityЖурнал нано- та електронної фізики2077-67722015-12-017404099-104099-3Influence of the Substrate Temperature on the Size Distribution and Phase Composition of Ablated HfO2 NanoparticlesV.I. Panfilov0M.A. Pugachevskii1A.P. Kuzmenko2M.B. Dobromyslov3Far Eastern State Transport University, Khabarovsk, RussiaInstitute of Materials Science, Khabarovsk Scientific Center, FEB RAS, Khabarovsk, RussiaDepartment of Nanotechnology & Engineering Physics, SWSU, Kursk, RussiaPacific National University, Khabarovsk, RussiaThe influence of the substrate temperature on the formation of high-temperature phases of hafnium dioxide in the process of pulsed laser ablation is investigated. It is established that the HfO2 nanoparticles of the high-temperature tetragonal and cubic phases with a quantitative content up to 50 % are formed on the surface of the substrate at room temperature during the laser ablation with intensity of 1010 W/m2. It is shown that with increasing the substrate temperature the average size of the ablated nanoparticles decreases and the quantitative content of the high-temperature phases is increased up to 70 %.http://jnep.sumdu.edu.ua/download/numbers/2015/4/articles/jnep_2015_V7_04099.pdfLaser ablationNanoparticlesHafnium dioxideHigh-temperature phas
spellingShingle V.I. Panfilov
M.A. Pugachevskii
A.P. Kuzmenko
M.B. Dobromyslov
Influence of the Substrate Temperature on the Size Distribution and Phase Composition of Ablated HfO2 Nanoparticles
Журнал нано- та електронної фізики
Laser ablation
Nanoparticles
Hafnium dioxide
High-temperature phas
title Influence of the Substrate Temperature on the Size Distribution and Phase Composition of Ablated HfO2 Nanoparticles
title_full Influence of the Substrate Temperature on the Size Distribution and Phase Composition of Ablated HfO2 Nanoparticles
title_fullStr Influence of the Substrate Temperature on the Size Distribution and Phase Composition of Ablated HfO2 Nanoparticles
title_full_unstemmed Influence of the Substrate Temperature on the Size Distribution and Phase Composition of Ablated HfO2 Nanoparticles
title_short Influence of the Substrate Temperature on the Size Distribution and Phase Composition of Ablated HfO2 Nanoparticles
title_sort influence of the substrate temperature on the size distribution and phase composition of ablated hfo2 nanoparticles
topic Laser ablation
Nanoparticles
Hafnium dioxide
High-temperature phas
url http://jnep.sumdu.edu.ua/download/numbers/2015/4/articles/jnep_2015_V7_04099.pdf
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AT apkuzmenko influenceofthesubstratetemperatureonthesizedistributionandphasecompositionofablatedhfo2nanoparticles
AT mbdobromyslov influenceofthesubstratetemperatureonthesizedistributionandphasecompositionofablatedhfo2nanoparticles