APA (7th ed.) Citation

Muto, T., & Kawabata, K. Electrical Properties of Titanium Nitride Thin Films Deposited by Reactive Sputtering. Wiley.

Chicago Style (17th ed.) Citation

Muto, T., and K. Kawabata. Electrical Properties of Titanium Nitride Thin Films Deposited by Reactive Sputtering. Wiley.

MLA (9th ed.) Citation

Muto, T., and K. Kawabata. Electrical Properties of Titanium Nitride Thin Films Deposited by Reactive Sputtering. Wiley.

Warning: These citations may not always be 100% accurate.