Piezoresistive Cantilever Microprobe with Integrated Actuator for Contact Resonance Imaging
A novel piezoresistive cantilever microprobe (PCM) with an integrated electrothermal or piezoelectric actuator has been designed to replace current commercial PCMs, which require external actuators to perform contact-resonance imaging (CRI) of workpieces and avoid unwanted “forest of peaks” observed...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-01-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/25/2/332 |
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