Research on the Withstand Voltage Properties of Cr/Mn-Doped Al<sub>2</sub>O<sub>3</sub> Ceramics in Vacuum

Al<sub>2</sub>O<sub>3</sub> ceramics are widely used in vacuum electronic devices. However, surface flashover in a vacuum during the application of high voltage significantly influences their reliability and restricts the development of vacuum electronic devices. The secondar...

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Bibliographic Details
Main Authors: Dandan Feng, Xiaojing Wang, Xueying Han, Zhiqiang Yu, Jialun Feng, Hefei Wang
Format: Article
Language:English
Published: MDPI AG 2025-03-01
Series:Electronic Materials
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Online Access:https://www.mdpi.com/2673-3978/6/1/4
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Summary:Al<sub>2</sub>O<sub>3</sub> ceramics are widely used in vacuum electronic devices. However, surface flashover in a vacuum during the application of high voltage significantly influences their reliability and restricts the development of vacuum electronic devices. The secondary electron emission yield (SEY) and surface resistivity of ceramics are the main factors affecting the vacuum withstand voltage of ceramic materials. In this study, the bulk density, microstructure, and surface properties—including SEY and surface resistivity—of Al<sub>2</sub>O<sub>3</sub> ceramics were tested. The relationship between these properties and the vacuum withstand voltage of the ceramics was investigated. The influence of the addition ratio of Cr<sub>2</sub>O<sub>3</sub> to MnO<sub>2</sub> and the sintering temperature was investigated. The results show Cr/Mn-doped Al<sub>2</sub>O<sub>3</sub> ceramics, with appropriate amounts of Cr<sub>2</sub>O<sub>3</sub> and MnO<sub>2</sub> and sintered at suitable temperatures, exhibit low SEY, high withstand voltage, and excellent stability in vacuum.
ISSN:2673-3978