Inhibition of Anti-Reflection Film Cracks on Plastic Substrates Using Nanolaminate Layer Deposition in Plasma-Enhanced Atomic Layer Deposition

Inhibition of Anti-Reflection Film Cracks on Plastic Substrates Using Nanolaminate Layer Deposition in Plasma-Enhanced Atomic Layer Deposition

In this research, we mainly increase the adhesion of PMMA substrate and film, which is reflected in the environmental test. This study used plasma-enhanced atomic layer deposition (PEALD) to find the relationship between the intensity of XRD reflection peak and the root-mean-square surface roughness...

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Bibliographic Details
Main Authors: Chi-Chieh Wang, Cheng-Fu Wang, Meng-Chi Li, Li-Chen Su, Chien-Cheng Kuo
Format: Article
Language:English
Published: MDPI AG 2024-12-01
Series:Technologies
Subjects:
nanolaminates
PEALD
crystallization
surface roughness
ductility
hafnium dioxide
Online Access:https://www.mdpi.com/2227-7080/13/1/11
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