APA (7th ed.) Citation

Horibe, H., & Goto, Y. Development of an Environmentally Friendly Resist-Removal Process Using Wet Ozone. Wiley.

Chicago Style (17th ed.) Citation

Horibe, Hideo, and Yousuke Goto. Development of an Environmentally Friendly Resist-Removal Process Using Wet Ozone. Wiley.

MLA (9th ed.) Citation

Horibe, Hideo, and Yousuke Goto. Development of an Environmentally Friendly Resist-Removal Process Using Wet Ozone. Wiley.

Warning: These citations may not always be 100% accurate.