Physical Properties of Sputtered Germanium-Doped Indium Tin Oxide Films (ITO: Ge) Obtained at Low Deposition Temperature

Undoped and Ge-doped ITO films (ITO: Ge) deposited at low temperature (70℃) have been studied. Although both samples have the same carrier concentration, a higher carrier mobility occurs for ITO: Ge. An evaluation of the relative position of the dopant associated energy states has been carried out....

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Main Authors: S. J. Wen, G. Campet, J. P. Manaud
Format: Article
Language:English
Published: Wiley 1993-01-01
Series:Active and Passive Electronic Components
Online Access:http://dx.doi.org/10.1155/1993/13729
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author S. J. Wen
G. Campet
J. P. Manaud
author_facet S. J. Wen
G. Campet
J. P. Manaud
author_sort S. J. Wen
collection DOAJ
description Undoped and Ge-doped ITO films (ITO: Ge) deposited at low temperature (70℃) have been studied. Although both samples have the same carrier concentration, a higher carrier mobility occurs for ITO: Ge. An evaluation of the relative position of the dopant associated energy states has been carried out.
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institution Kabale University
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1563-5031
language English
publishDate 1993-01-01
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series Active and Passive Electronic Components
spelling doaj-art-9a4cc7d5159e42ce93fcc208e2358c6b2025-02-03T01:21:13ZengWileyActive and Passive Electronic Components0882-75161563-50311993-01-01152677410.1155/1993/13729Physical Properties of Sputtered Germanium-Doped Indium Tin Oxide Films (ITO: Ge) Obtained at Low Deposition TemperatureS. J. Wen0G. Campet1J. P. Manaud2Laboratoire de Chimie du Solide du CNRS, Université Bordeaux I, 351 Cours de la Libération, Talence 33405, FranceLaboratoire de Chimie du Solide du CNRS, Université Bordeaux I, 351 Cours de la Libération, Talence 33405, FranceLaboratoire de Chimie du Solide du CNRS, Université Bordeaux I, 351 Cours de la Libération, Talence 33405, FranceUndoped and Ge-doped ITO films (ITO: Ge) deposited at low temperature (70℃) have been studied. Although both samples have the same carrier concentration, a higher carrier mobility occurs for ITO: Ge. An evaluation of the relative position of the dopant associated energy states has been carried out.http://dx.doi.org/10.1155/1993/13729
spellingShingle S. J. Wen
G. Campet
J. P. Manaud
Physical Properties of Sputtered Germanium-Doped Indium Tin Oxide Films (ITO: Ge) Obtained at Low Deposition Temperature
Active and Passive Electronic Components
title Physical Properties of Sputtered Germanium-Doped Indium Tin Oxide Films (ITO: Ge) Obtained at Low Deposition Temperature
title_full Physical Properties of Sputtered Germanium-Doped Indium Tin Oxide Films (ITO: Ge) Obtained at Low Deposition Temperature
title_fullStr Physical Properties of Sputtered Germanium-Doped Indium Tin Oxide Films (ITO: Ge) Obtained at Low Deposition Temperature
title_full_unstemmed Physical Properties of Sputtered Germanium-Doped Indium Tin Oxide Films (ITO: Ge) Obtained at Low Deposition Temperature
title_short Physical Properties of Sputtered Germanium-Doped Indium Tin Oxide Films (ITO: Ge) Obtained at Low Deposition Temperature
title_sort physical properties of sputtered germanium doped indium tin oxide films ito ge obtained at low deposition temperature
url http://dx.doi.org/10.1155/1993/13729
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AT jpmanaud physicalpropertiesofsputteredgermaniumdopedindiumtinoxidefilmsitogeobtainedatlowdepositiontemperature