Narrowband, Visible-Blind UV-A Sensor Based on a Mg0.52Zn0.48O Film Deposited by Radio-Frequency Sputtering Using a ZnO-Mg Composite Target
A narrowband, visible-blind ultraviolet photodetector (PD) for UV-A is fabricated using a Mg0.52Zn0.48O film that is formed on a quartz substrate by a radio-frequency sputtering technique using a ZnO-Mg composite target. The content of Mg in the film is controlled by varying the number of Mg chips o...
Saved in:
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Wiley
2014-01-01
|
| Series: | Advances in Materials Science and Engineering |
| Online Access: | http://dx.doi.org/10.1155/2014/120463 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| _version_ | 1832551752627388416 |
|---|---|
| author | Yuki Kohama Takuya Nagai Mitsuru Inada Tadashi Saitoh |
| author_facet | Yuki Kohama Takuya Nagai Mitsuru Inada Tadashi Saitoh |
| author_sort | Yuki Kohama |
| collection | DOAJ |
| description | A narrowband, visible-blind ultraviolet photodetector (PD) for UV-A is fabricated using a Mg0.52Zn0.48O film that is formed on a quartz substrate by a radio-frequency sputtering technique using a ZnO-Mg composite target. The content of Mg in the film is controlled by varying the number of Mg chips on the ZnO plate. The fabricated PD has a metal-semiconductor-metal structure with interdigitated electrodes and exhibits a narrow 3 dB bandwidth of 26 nm with a peak response wavelength of 340 nm and a cut-off wavelength of 353 nm. Moreover, the peak responsivity of the PD increases linearly with the bias voltage up to 30 V, indicating that the device operates via a photoconductive gain mechanism. |
| format | Article |
| id | doaj-art-99fa6e462eb14e20be7a93799c7bf3b0 |
| institution | Kabale University |
| issn | 1687-8434 1687-8442 |
| language | English |
| publishDate | 2014-01-01 |
| publisher | Wiley |
| record_format | Article |
| series | Advances in Materials Science and Engineering |
| spelling | doaj-art-99fa6e462eb14e20be7a93799c7bf3b02025-02-03T06:00:41ZengWileyAdvances in Materials Science and Engineering1687-84341687-84422014-01-01201410.1155/2014/120463120463Narrowband, Visible-Blind UV-A Sensor Based on a Mg0.52Zn0.48O Film Deposited by Radio-Frequency Sputtering Using a ZnO-Mg Composite TargetYuki Kohama0Takuya Nagai1Mitsuru Inada2Tadashi Saitoh3Department of Pure and Applied Physics, Faculty of Engineering Science, Kansai University, Osaka 564-8680, JapanDepartment of Pure and Applied Physics, Faculty of Engineering Science, Kansai University, Osaka 564-8680, JapanDepartment of Pure and Applied Physics, Faculty of Engineering Science, Kansai University, Osaka 564-8680, JapanDepartment of Pure and Applied Physics, Faculty of Engineering Science, Kansai University, Osaka 564-8680, JapanA narrowband, visible-blind ultraviolet photodetector (PD) for UV-A is fabricated using a Mg0.52Zn0.48O film that is formed on a quartz substrate by a radio-frequency sputtering technique using a ZnO-Mg composite target. The content of Mg in the film is controlled by varying the number of Mg chips on the ZnO plate. The fabricated PD has a metal-semiconductor-metal structure with interdigitated electrodes and exhibits a narrow 3 dB bandwidth of 26 nm with a peak response wavelength of 340 nm and a cut-off wavelength of 353 nm. Moreover, the peak responsivity of the PD increases linearly with the bias voltage up to 30 V, indicating that the device operates via a photoconductive gain mechanism.http://dx.doi.org/10.1155/2014/120463 |
| spellingShingle | Yuki Kohama Takuya Nagai Mitsuru Inada Tadashi Saitoh Narrowband, Visible-Blind UV-A Sensor Based on a Mg0.52Zn0.48O Film Deposited by Radio-Frequency Sputtering Using a ZnO-Mg Composite Target Advances in Materials Science and Engineering |
| title | Narrowband, Visible-Blind UV-A Sensor Based on a Mg0.52Zn0.48O Film Deposited by Radio-Frequency Sputtering Using a ZnO-Mg Composite Target |
| title_full | Narrowband, Visible-Blind UV-A Sensor Based on a Mg0.52Zn0.48O Film Deposited by Radio-Frequency Sputtering Using a ZnO-Mg Composite Target |
| title_fullStr | Narrowband, Visible-Blind UV-A Sensor Based on a Mg0.52Zn0.48O Film Deposited by Radio-Frequency Sputtering Using a ZnO-Mg Composite Target |
| title_full_unstemmed | Narrowband, Visible-Blind UV-A Sensor Based on a Mg0.52Zn0.48O Film Deposited by Radio-Frequency Sputtering Using a ZnO-Mg Composite Target |
| title_short | Narrowband, Visible-Blind UV-A Sensor Based on a Mg0.52Zn0.48O Film Deposited by Radio-Frequency Sputtering Using a ZnO-Mg Composite Target |
| title_sort | narrowband visible blind uv a sensor based on a mg0 52zn0 48o film deposited by radio frequency sputtering using a zno mg composite target |
| url | http://dx.doi.org/10.1155/2014/120463 |
| work_keys_str_mv | AT yukikohama narrowbandvisibleblinduvasensorbasedonamg052zn048ofilmdepositedbyradiofrequencysputteringusingaznomgcompositetarget AT takuyanagai narrowbandvisibleblinduvasensorbasedonamg052zn048ofilmdepositedbyradiofrequencysputteringusingaznomgcompositetarget AT mitsuruinada narrowbandvisibleblinduvasensorbasedonamg052zn048ofilmdepositedbyradiofrequencysputteringusingaznomgcompositetarget AT tadashisaitoh narrowbandvisibleblinduvasensorbasedonamg052zn048ofilmdepositedbyradiofrequencysputteringusingaznomgcompositetarget |