MEMS Acoustic Sensors: Charting the Path from Research to Real-World Applications

MEMS Acoustic Sensors: Charting the Path from Research to Real-World Applications

MEMS acoustic sensors are a type of physical quantity sensor based on MEMS manufacturing technology for detecting sound waves. They utilize various sensitive structures such as thin films, cantilever beams, or cilia to collect acoustic energy, and use certain transduction principles to read out the...

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Bibliographic Details
Main Authors: Qingyi Wang, Yang Zhang, Sizhe Cheng, Xianyang Wang, Shengjun Wu, Xufeng Liu
Format: Article
Language:English
Published: MDPI AG 2024-12-01
Series:Micromachines
Subjects:
MEMS
acoustic sensor
working principles
performance
application
Online Access:https://www.mdpi.com/2072-666X/16/1/43
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