MEMS Acoustic Sensors: Charting the Path from Research to Real-World Applications
MEMS acoustic sensors are a type of physical quantity sensor based on MEMS manufacturing technology for detecting sound waves. They utilize various sensitive structures such as thin films, cantilever beams, or cilia to collect acoustic energy, and use certain transduction principles to read out the...
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| Format: | Article |
| Language: | English |
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MDPI AG
2024-12-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/16/1/43 |
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| author | Qingyi Wang Yang Zhang Sizhe Cheng Xianyang Wang Shengjun Wu Xufeng Liu |
| author_facet | Qingyi Wang Yang Zhang Sizhe Cheng Xianyang Wang Shengjun Wu Xufeng Liu |
| author_sort | Qingyi Wang |
| collection | DOAJ |
| description | MEMS acoustic sensors are a type of physical quantity sensor based on MEMS manufacturing technology for detecting sound waves. They utilize various sensitive structures such as thin films, cantilever beams, or cilia to collect acoustic energy, and use certain transduction principles to read out the generated strain, thereby obtaining the targeted acoustic signal’s information, such as its intensity, direction, and distribution. Due to their advantages in miniaturization, low power consumption, high precision, high consistency, high repeatability, high reliability, and ease of integration, MEMS acoustic sensors are widely applied in many areas, such as consumer electronics, industrial perception, military equipment, and health monitoring. Through different sensing mechanisms, they can be used to detect sound energy density, acoustic pressure distribution, and sound wave direction. This article focuses on piezoelectric, piezoresistive, capacitive, and optical MEMS acoustic sensors, showcasing their development in recent years, as well as innovations in their structure, process, and design methods. Then, this review compares the performance of devices with similar working principles. MEMS acoustic sensors have been increasingly widely applied in various fields, including traditional advantage areas such as microphones, stethoscopes, hydrophones, and ultrasound imaging, and cutting-edge fields such as biomedical wearable and implantable devices. |
| format | Article |
| id | doaj-art-9895641d02d349bd9ed52419864021ad |
| institution | Kabale University |
| issn | 2072-666X |
| language | English |
| publishDate | 2024-12-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj-art-9895641d02d349bd9ed52419864021ad2025-01-24T13:41:56ZengMDPI AGMicromachines2072-666X2024-12-011614310.3390/mi16010043MEMS Acoustic Sensors: Charting the Path from Research to Real-World ApplicationsQingyi Wang0Yang Zhang1Sizhe Cheng2Xianyang Wang3Shengjun Wu4Xufeng Liu5School of Basic Medicine, Air Force Medical University, Xi’an 710032, ChinaSchool of Biomedical Engineering, Air Force Medical University, Xi’an 710032, ChinaSchool of Military Medical Psychology, Air Force Medical University, Xi’an 710032, ChinaSchool of Military Medical Psychology, Air Force Medical University, Xi’an 710032, ChinaSchool of Military Medical Psychology, Air Force Medical University, Xi’an 710032, ChinaSchool of Military Medical Psychology, Air Force Medical University, Xi’an 710032, ChinaMEMS acoustic sensors are a type of physical quantity sensor based on MEMS manufacturing technology for detecting sound waves. They utilize various sensitive structures such as thin films, cantilever beams, or cilia to collect acoustic energy, and use certain transduction principles to read out the generated strain, thereby obtaining the targeted acoustic signal’s information, such as its intensity, direction, and distribution. Due to their advantages in miniaturization, low power consumption, high precision, high consistency, high repeatability, high reliability, and ease of integration, MEMS acoustic sensors are widely applied in many areas, such as consumer electronics, industrial perception, military equipment, and health monitoring. Through different sensing mechanisms, they can be used to detect sound energy density, acoustic pressure distribution, and sound wave direction. This article focuses on piezoelectric, piezoresistive, capacitive, and optical MEMS acoustic sensors, showcasing their development in recent years, as well as innovations in their structure, process, and design methods. Then, this review compares the performance of devices with similar working principles. MEMS acoustic sensors have been increasingly widely applied in various fields, including traditional advantage areas such as microphones, stethoscopes, hydrophones, and ultrasound imaging, and cutting-edge fields such as biomedical wearable and implantable devices.https://www.mdpi.com/2072-666X/16/1/43MEMSacoustic sensorworking principlesperformanceapplication |
| spellingShingle | Qingyi Wang Yang Zhang Sizhe Cheng Xianyang Wang Shengjun Wu Xufeng Liu MEMS Acoustic Sensors: Charting the Path from Research to Real-World Applications Micromachines MEMS acoustic sensor working principles performance application |
| title | MEMS Acoustic Sensors: Charting the Path from Research to Real-World Applications |
| title_full | MEMS Acoustic Sensors: Charting the Path from Research to Real-World Applications |
| title_fullStr | MEMS Acoustic Sensors: Charting the Path from Research to Real-World Applications |
| title_full_unstemmed | MEMS Acoustic Sensors: Charting the Path from Research to Real-World Applications |
| title_short | MEMS Acoustic Sensors: Charting the Path from Research to Real-World Applications |
| title_sort | mems acoustic sensors charting the path from research to real world applications |
| topic | MEMS acoustic sensor working principles performance application |
| url | https://www.mdpi.com/2072-666X/16/1/43 |
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