Principles and Applications of Ceramic Humidity Sensors
This paper presents a brief review of the state of the art in humidity and gas ceramic sensors R&D; it also describes the principle, fabrication and application of the humidity-sensitive Si-doped a-hematite (α-Fe2O3) sintered compacts. The humidity signal response is characterized by volt-ampero...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
1994-01-01
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| Series: | Active and Passive Electronic Components |
| Online Access: | http://dx.doi.org/10.1155/1994/91016 |
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| Summary: | This paper presents a brief review of the state of the art in humidity and gas ceramic sensors R&D; it
also describes the principle, fabrication and application of the humidity-sensitive Si-doped a-hematite
(α-Fe2O3) sintered compacts.
The humidity signal response is characterized by volt-amperometric and impedance spectroscopy
techniques in the 0-97% relative humidity (RH) range. The response time of the sensor is evaluated
by 0-60% RH variations. Experimental techniques used to measure the hysteresis, drift, and aging of
the humidity setasor are presented and the results are discussed. The CO sensitivity is investigated by
activating the sensor in the 350-450℃ temperature range.
A humidity-meter prototype, based on the α-Fe2O3 ceramic compact is described, and its electronics
and features are presented in this paper. |
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| ISSN: | 0882-7516 1563-5031 |