微型齿轮研制中微细加工技术的应用研究
本文研究了在紫外光光刻条件下用微细加工方法研制微型齿轮的加工工艺 ,对加工过程进行了分析 ,加工水平已达到准LIGA水平
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| Main Authors: | , , |
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| Format: | Article |
| Language: | zho |
| Published: |
Editorial Office of Journal of Mechanical Transmission
1998-01-01
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| Series: | Jixie chuandong |
| Online Access: | http://www.jxcd.net.cn/thesisDetails#10.16578/j.issn.1004.2539.1998.04.013 |
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