Low-Cost Optical Filters Based on SiO<sub>x</sub>C<sub>y</sub>:H and Ag Thin Films Fabricated by Plasma Enhanced Chemical Vapor Deposition and Sputtering

Low-Cost Optical Filters Based on SiO<sub>x</sub>C<sub>y</sub>:H and Ag Thin Films Fabricated by Plasma Enhanced Chemical Vapor Deposition and Sputtering

Hexamethyldisiloxane (HMDSO) is an organosilicon compound with a modifiable bandgap, depending on the deposition conditions. This material has many unique properties due to its stability, low toxicity, and strong adhesion, making it useful as a protective barrier against corrosion, moisture, and oxi...

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Bibliographic Details
Main Authors: Ahmed Kotbi, Michael Lejeune, Pierre Barroy, Ilham Hamdi Alaoui, Wiaam El Hakim, Frederic Lamarque, Andreas Zeinert
Format: Article
Language:English
Published: MDPI AG 2024-11-01
Series:Photonics
Subjects:
thin films
PECVD
sputtering
HMDSO
silver
optical properties
Online Access:https://www.mdpi.com/2304-6732/11/11/1096
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