RF Magnetron Sputtering of Silicon Carbide and Silicon Nitride Films for Solar Cells
RF-magnetron nonreactive sputtering method from solid-phase target in argon atmosphere was used for obtaining thin silicon carbide and silicon nitride films, that are used for constructing solar cells based on substrates of single crystal silicon of p-type.
Saved in:
| Main Authors: | , , , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2014-07-01
|
| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2014/3/articles/jnep_2014_V6_03062.pdf |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|