MATHEMATICAL MODELING OF A DISTANCE DEPENDENCE OF A SCANNING KELVIN PROBE LATERAL RESOLUTION

A mathematical model of cylindrical shaped plane-ended scanning Kelvin probe output signal is proposed considering the case of an infinite plane sample's surface with local defects represented by dot charges. Modeling results were obtained for the case of two closely situated dot charges anddif...

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Main Author: A. K. Tyavlovsky
Format: Article
Language:English
Published: Belarusian National Technical University 2015-04-01
Series:Приборы и методы измерений
Subjects:
Online Access:https://pimi.bntu.by/jour/article/view/111
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author A. K. Tyavlovsky
author_facet A. K. Tyavlovsky
author_sort A. K. Tyavlovsky
collection DOAJ
description A mathematical model of cylindrical shaped plane-ended scanning Kelvin probe output signal is proposed considering the case of an infinite plane sample's surface with local defects represented by dot charges. Modeling results were obtained for the case of two closely situated dot charges anddifferent combinations of scanning Kelvin probe tip's diameter and sample-to-probe gap. It was found that the most effective way to improve the lateral resolution of a scanning Kelvin probe is to reduce the sample-to-probe gap in line with the reduction of sensor's vibration amplitude.
format Article
id doaj-art-90524f28d69d466197c5ce3408955443
institution Kabale University
issn 2220-9506
2414-0473
language English
publishDate 2015-04-01
publisher Belarusian National Technical University
record_format Article
series Приборы и методы измерений
spelling doaj-art-90524f28d69d466197c5ce34089554432025-02-03T05:16:56ZengBelarusian National Technical UniversityПриборы и методы измерений2220-95062414-04732015-04-01013036105MATHEMATICAL MODELING OF A DISTANCE DEPENDENCE OF A SCANNING KELVIN PROBE LATERAL RESOLUTIONA. K. Tyavlovsky0Belarusian National Technical UniversityA mathematical model of cylindrical shaped plane-ended scanning Kelvin probe output signal is proposed considering the case of an infinite plane sample's surface with local defects represented by dot charges. Modeling results were obtained for the case of two closely situated dot charges anddifferent combinations of scanning Kelvin probe tip's diameter and sample-to-probe gap. It was found that the most effective way to improve the lateral resolution of a scanning Kelvin probe is to reduce the sample-to-probe gap in line with the reduction of sensor's vibration amplitude.https://pimi.bntu.by/jour/article/view/111kelvin probelateral resolutionmethod of imageselectric charge
spellingShingle A. K. Tyavlovsky
MATHEMATICAL MODELING OF A DISTANCE DEPENDENCE OF A SCANNING KELVIN PROBE LATERAL RESOLUTION
Приборы и методы измерений
kelvin probe
lateral resolution
method of images
electric charge
title MATHEMATICAL MODELING OF A DISTANCE DEPENDENCE OF A SCANNING KELVIN PROBE LATERAL RESOLUTION
title_full MATHEMATICAL MODELING OF A DISTANCE DEPENDENCE OF A SCANNING KELVIN PROBE LATERAL RESOLUTION
title_fullStr MATHEMATICAL MODELING OF A DISTANCE DEPENDENCE OF A SCANNING KELVIN PROBE LATERAL RESOLUTION
title_full_unstemmed MATHEMATICAL MODELING OF A DISTANCE DEPENDENCE OF A SCANNING KELVIN PROBE LATERAL RESOLUTION
title_short MATHEMATICAL MODELING OF A DISTANCE DEPENDENCE OF A SCANNING KELVIN PROBE LATERAL RESOLUTION
title_sort mathematical modeling of a distance dependence of a scanning kelvin probe lateral resolution
topic kelvin probe
lateral resolution
method of images
electric charge
url https://pimi.bntu.by/jour/article/view/111
work_keys_str_mv AT aktyavlovsky mathematicalmodelingofadistancedependenceofascanningkelvinprobelateralresolution