Theoretical Prediction of the Impact of Phosphorus Doping on the Elastic Constants of Silicon
Accurately controlling the mechanical properties of silicon is essential for developing high-performance micro-devices and systems. In this study, we investigate the influence of phosphorus doping on the elastic constants of silicon across a wide temperature range using a combination of tight-bindin...
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| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2025-06-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/16/7/748 |
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